Problem amtetcher SNF 2009-06-06 19:21:42: Stuck at "PMPDNG MNFLD"

mislam at snf.stanford.edu mislam at snf.stanford.edu
Sat Jun 6 19:21:43 PDT 2009


Can not abort or vent chamber. My 14 wafers inside. Please save my wafer in the wafer box if unloaded.  Thanks. 




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