Comment amtetcher SNF 2009-06-25 07:51:32: Update gas 5 and SF6 flow problem

eenriquez at eenriquez at
Thu Jun 25 07:51:33 PDT 2009

Replaced gas 5 MFC (NF3) and SF6 MFC but NF3 is still not shutting off in time and SF6 is still not flowing.  We have ordered rebuild kits for the obselete pneumatic gas shut-off valves.  They should be here next week.

More information about the amtetcher-pcs mailing list