Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 25 14:04:32 PDT 2009


I ran one wafer in each tray in the #2 position and measured five pionts per wafer.  The results are within the +/- 5% variation in a wafer.
The resutls are posted on the wiki.  I will post a summary in comments.
During the run both SF6 and NF3 showed 1sccm.  We believe this to be a false reading as those MFC's are defective.




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