June 2009 Archives by author

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Starting: Mon Jun 1 12:39:39 PDT 2009
Ending: Thu Jun 25 14:08:46 PDT 2009
Messages: 47

Comment amtetcher SNF 2009-06-07 16:01:15: "Turbo went off" dalyx at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range duygu at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:32:50: high pressure error duygu at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:36:37: pump stack leak error duygu at snf.stanford.edu
Shutdown amtetcher SNF 2009-06-01 12:39:37: Turbo purge eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2009-06-01 12:39:37: Turbo purge eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-05-31 10:47:08: "Turbo Purge OFF" error eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-05-28 23:40:31: "Turbo Purge OFF" error eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-05-28 18:00:52: "Turbo purge off" alarm eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-05-22 13:34:25: Wiped down eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-05-22 12:23:50: polymer flakes eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-05-22 08:43:00: Hexode eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-05-21 22:47:22: Polymer flakes eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-06-04 10:35:58: Vacuum wand eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-04 12:34:55: Update Gas 5 and SF6 problem eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-08 08:49:17: Update eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2009-06-08 08:55:43: Defective vac pump eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2009-06-08 08:55:43: Defective vac pump eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-08 08:49:17: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-07 16:01:15: "Turbo went off" eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-07 12:37:39: Unloaded my wafers eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 19:21:42: Stuck at "PMPDNG MNFLD" eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:36:37: pump stack leak error eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:32:50: high pressure error eenriquez at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-04 12:34:55: Update Gas 5 and SF6 problem eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-25 07:51:32: Update gas 5 and SF6 flow problem eenriquez at snf.stanford.edu
Comment amtetcher SNF 2009-06-04 19:36:45: jig does not stay down jwpchen at snf.stanford.edu
Problem amtetcher SNF 2009-05-07 15:57:06: No SF6 flow latta at snf.stanford.edu
Comment amtetcher SNF 2009-05-11 11:21:55: Update No SF6 latta at snf.stanford.edu
Comment amtetcher SNF 2009-05-20 21:33:52: large black mark found on top right of 2nd tray - cleaned by Elmer latta at snf.stanford.edu
Problem amtetcher SNF 2009-05-22 16:04:51: Still no SF6 latta at snf.stanford.edu
Problem amtetcher SNF 2009-06-03 19:19:08: Gas 5 won't close latta at snf.stanford.edu
Comment amtetcher SNF 2009-06-04 19:36:45: jig does not stay down latta at snf.stanford.edu
Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent latta at snf.stanford.edu
Comment amtetcher SNF 2009-06-25 14:08:45: Uniformity within a wafer latta at snf.stanford.edu
Problem amtetcher SNF 2009-06-02 17:16:03: bell jar lwchang at snf.stanford.edu
Problem amtetcher SNF 2009-06-02 17:16:03: bell jar mdickey at snf.stanford.edu
Problem amtetcher SNF 2009-06-10 17:29:24: Vacuum wand is dead. mdickey at snf.stanford.edu
Problem amtetcher SNF 2009-06-05 19:19:26: vacuum wand vacuum very weak mdickey at snf.stanford.edu
Problem amtetcher SNF 2009-06-06 19:21:42: Stuck at "PMPDNG MNFLD" mislam at snf.stanford.edu
Comment amtetcher SNF 2009-06-07 12:37:39: Unloaded my wafers mislam at snf.stanford.edu
Problem amtetcher SNF 2009-06-05 19:19:26: vacuum wand vacuum very weak rshyam at snf.stanford.edu
Problem amtetcher SNF 2009-06-03 19:19:08: Gas 5 won't close tura at snf.stanford.edu
Problem amtetcher SNF 2009-06-04 10:35:58: Vacuum wand tura at snf.stanford.edu
Problem amtetcher SNF 2009-06-10 17:29:24: Vacuum wand is dead. tura at snf.stanford.edu
Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent tura at snf.stanford.edu

Last message date: Thu Jun 25 14:08:46 PDT 2009
Archived on: Fri Jan 11 13:04:30 PST 2013

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