From huigensr at snf.stanford.edu Mon Mar 2 16:14:39 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:14:39 -0800 Subject: Problem amtetcher SNF 2009-03-02 16:14:39: Broken Foot Message-ID: Panel 5 - top position Foot is broken in such a way that the panel sticks badly (at times) when removed from tower. Top wafer is in danger of breaking due to the sticking... From ericp at snf.stanford.edu Mon Mar 2 23:27:42 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 2 Mar 2009 23:27:42 -0800 Subject: Problem amtetcher SNF 2009-03-02 23:27:41: use at your own risk Message-ID: The machine went down hard an hour or so ago. At first I thought it was an accidental EPO, but it went down harder than "usual", and lost everything in memory. I reprogrammed the MFC/corrections, but not all of the syscon's, like temperatures. I only reprogrammed #2 (standby) and #3 standard oxide. NEEDS A QUAL BEFORE CLEARING! Thanks, -Eric From eenriquez at snf.stanford.edu Tue Mar 3 08:28:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 08:28:53 -0800 Subject: Shutdown amtetcher SNF 2009-03-03 08:28:53: Software problem Message-ID: Tool is displaying SYSTEM ERROR CS 009E 00 0B7C From eenriquez at snf.stanford.edu Tue Mar 3 14:28:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 14:28:23 -0800 Subject: Problem amtetcher SNF 2009-03-02 16:14:39: Broken Foot Message-ID: Replaced the worn wafer clips. From eenriquez at snf.stanford.edu Tue Mar 3 14:32:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 14:32:55 -0800 Subject: Shutdown amtetcher SNF 2009-03-03 08:28:53: Software problem Message-ID: Re-seated the cpu and memory boards. Re-entered all system constants, MFC parameters and recipes 1-5. Ran several processes many times without a problem. From eenriquez at snf.stanford.edu Tue Mar 3 14:33:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 14:33:27 -0800 Subject: Comment amtetcher SNF 2008-12-11 15:00:43: Gas5 Error work around Message-ID: fixed From eenriquez at snf.stanford.edu Tue Mar 3 14:33:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 14:33:35 -0800 Subject: Problem amtetcher SNF 2009-03-02 23:27:41: use at your own risk Message-ID: Re-seated the cpu and memory boards. Re-entered all system constants, MFC parameters and recipes 1-5. Ran several processes many times without a problem. From eenriquez at snf.stanford.edu Tue Mar 3 14:37:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 14:37:57 -0800 Subject: Problem amtetcher SNF 2009-03-03 14:37:56: Needs a process qual Message-ID: Please qualify the process before committing your actual device. From cbaxter at snf.stanford.edu Wed Mar 4 17:23:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Mar 2009 17:23:17 -0800 Subject: Comment amtetcher SNF 2009-03-04 16:55:53: Program 2 recipes are wrong Message-ID: Edited recipe#2 w/cryo off. From jhpark9 at snf.stanford.edu Wed Mar 4 23:21:49 2009 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 4 Mar 2009 23:21:49 -0800 Subject: Problem amtetcher SNF 2009-03-04 23:21:48: some error after the previous user's process Message-ID: I think that some error was occured while running the program #2 after the previous user finished his process. Please check this. From jhpark9 at snf.stanford.edu Wed Mar 4 23:24:08 2009 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 4 Mar 2009 23:24:08 -0800 Subject: Shutdown amtetcher SNF 2009-03-04 23:24:07: See the previous report Message-ID: From eenriquez at snf.stanford.edu Thu Mar 5 15:03:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Mar 2009 15:03:20 -0800 Subject: Shutdown amtetcher SNF 2009-03-04 23:24:07: See the previous report Message-ID: System had a EPROM failure error followed by a TP7 CCCC 000 alarm. Installed spare EPROM boards but symptoms got worse. Replaced the battery backup board. System has been stable now for several hours. Reentered all systems constants, MFC config data and recipes 1 and 2. Ran recipe several times with no problems. If problem re-occurs, the plan is to replace individual EPROM chips. From eenriquez at snf.stanford.edu Thu Mar 5 15:03:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Mar 2009 15:03:30 -0800 Subject: Problem amtetcher SNF 2009-03-04 23:21:48: some error after the previous user's process Message-ID: System had a EPROM failure error followed by a TP7 CCCC 000 alarm. Installed spare EPROM boards but symptoms got worse. Replaced the battery backup board. System has been stable now for several hours. Reentered all systems constants, MFC config data and recipes 1 and 2. Ran recipe several times with no problems. If problem re-occurs, the plan is to replace individual EPROM chips. From eenriquez at snf.stanford.edu Thu Mar 5 15:10:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Mar 2009 15:10:51 -0800 Subject: Problem amtetcher SNF 2009-03-05 15:10:51: EPROM problem Message-ID: System is under observation. It is operational now and has been stable for several hours. Please run at your own risk. Only recipes 1 and 2 have been programs. System had an EPROM failure error followed by a TP7 CCCC 000 alarm. Installed spare EPROM boards but symptoms got worse. Replaced the battery backup board. System has been stable now for several hours. Reentered all systems constants, MFC config data and recipes 1 and 2. Ran recipe several times with no problems. If problem re-occurs, the plan is to replace individual EPROM chips. From eenriquez at snf.stanford.edu Fri Mar 20 09:20:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Mar 2009 09:20:05 -0700 Subject: Problem amtetcher SNF 2009-03-05 15:10:51: EPROM problem Message-ID: System has been stable since replacing the battery backup board. From jwpchen at snf.stanford.edu Mon Mar 23 08:46:15 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Mon, 23 Mar 2009 08:46:15 -0700 Subject: Comment amtetcher SNF 2009-03-23 08:46:14: worn dummies Message-ID: got a 2nd opinion from john shott, some dummies are not in the greatest condition, covered with what looks like particles