From ahryciw at snf.stanford.edu Thu May 7 15:57:07 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Thu, 7 May 2009 15:57:07 -0700 Subject: Problem amtetcher SNF 2009-05-07 15:57:06: No SF6 flow Message-ID: A new recipe I am trying uses 7 sccm O2 and 70 sccm SF6. The oxygen flow stabilised quickly during the "Wait Flow" segment of the process, but the SF6 flow did not rise above zero, causing a flow time-out alarm. The SF6 valve appears to be open behind the tool. Is there a trick to using SF6 in amtetcher? From eenriquez at snf.stanford.edu Mon May 11 11:21:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 May 2009 11:21:56 -0700 Subject: Comment amtetcher SNF 2009-05-11 11:21:55: Update No SF6 Message-ID: Still no SF6 flow (gas 3). Possibly a bad MFC or pneumatic valve. Gas line and solenoid valve (actuates pneumatic valve) are OK. Needs more troubleshooting. From quickwin at snf.stanford.edu Mon May 11 19:03:35 2009 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mon, 11 May 2009 19:03:35 -0700 Subject: Shutdown amtetcher SNF 2009-05-11 19:03:34: pressure out of limit error Message-ID: Process pressure can not go below 85 mT (process pressure is 40 mt) using Program 3. Tried it several times with the same result. From eenriquez at snf.stanford.edu Tue May 12 14:47:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 May 2009 14:47:10 -0700 Subject: Shutdown amtetcher SNF 2009-05-11 19:03:34: pressure out of limit error Message-ID: O2 MFC was stuck at full open. Unplugged and plugged the MFC cable several times. Ran recipe 3 and recipe 2 with no problems. From quickwin at snf.stanford.edu Wed May 13 10:01:16 2009 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Wed, 13 May 2009 10:01:16 -0700 Subject: Comment amtetcher SNF 2009-05-13 10:01:15: can the observation window be replaced? Message-ID: The observation window is too cloudy now. Could it be replaced? From mdickey at snf.stanford.edu Wed May 13 13:12:48 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 May 2009 13:12:48 -0700 Subject: Comment amtetcher SNF 2009-05-13 10:01:15: can the observation window be replaced? Message-ID: Cleaned up the inside of the window with acetone. A little better but will look inot replacement From rshyam at snf.stanford.edu Tue May 19 18:25:08 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 19 May 2009 18:25:08 -0700 Subject: Problem amtetcher SNF 2009-05-19 18:25:07: found burn marks on topright of 2nd wafer holder Message-ID: From mdickey at snf.stanford.edu Wed May 20 07:10:20 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 May 2009 07:10:20 -0700 Subject: Problem amtetcher SNF 2009-05-19 18:25:07: found burn marks on topright of 2nd wafer holder Message-ID: Replaced burnt ardel hexode strap and cleaned up arc marks. Adjusted tray clip From kcbalram at snf.stanford.edu Wed May 20 10:36:19 2009 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Wed, 20 May 2009 10:36:19 -0700 Subject: Shutdown amtetcher SNF 2009-05-20 10:36:18: Second rack shows sign of arcing Message-ID: The second rack, (F) top right corner shows sign of arcing was found during chamber inspection before running any processes Put the bell down. system is still vented. Nancy asked me to shutdown the machine Krishna From mdickey at snf.stanford.edu Wed May 20 13:16:08 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 May 2009 13:16:08 -0700 Subject: Shutdown amtetcher SNF 2009-05-20 10:36:18: Second rack shows sign of arcing Message-ID: System has been cleaned up and fixed From skoh at snf.stanford.edu Wed May 20 21:33:53 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 20 May 2009 21:33:53 -0700 Subject: Comment amtetcher SNF 2009-05-20 21:33:52: large black mark found on top right of 2nd tray - cleaned by Elmer Message-ID: Before seasoning the chamber this evening, I checked the trays and found the large black mark (on the back) on the top right corner of the 2nd tray. Elmer cleaned the tray before I used it. Appears to be the same area observed by rshyam on 5/19. From nharjee at snf.stanford.edu Thu May 21 22:47:23 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 21 May 2009 22:47:23 -0700 Subject: Comment amtetcher SNF 2009-05-21 22:47:22: Polymer flakes Message-ID: The floor of the chamber was littered with polymer flakes. I cleaned it up as best I could. From mdickey at snf.stanford.edu Fri May 22 08:43:00 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 22 May 2009 08:43:00 -0700 Subject: Comment amtetcher SNF 2009-05-22 08:43:00: Hexode Message-ID: Cleaned up flaking on top of hexode base plate From ginel at snf.stanford.edu Fri May 22 12:23:51 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 22 May 2009 12:23:51 -0700 Subject: Problem amtetcher SNF 2009-05-22 12:23:50: polymer flakes Message-ID: on chamber floor and stuck to dummy wafers... From mdickey at snf.stanford.edu Fri May 22 13:34:25 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 22 May 2009 13:34:25 -0700 Subject: Comment amtetcher SNF 2009-05-22 13:34:25: Wiped down Message-ID: Wiped down the base plate of loose particles. Did notice a few particles on the dummy wafers. From ahryciw at snf.stanford.edu Fri May 22 16:04:51 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Fri, 22 May 2009 16:04:51 -0700 Subject: Problem amtetcher SNF 2009-05-22 16:04:51: Still no SF6 Message-ID: I tried running a recipe involving O2 and SF6 again: as before (May 7th), the SF6 flow remains at zero during the "wait flow" stage, although oxygen stabilised as normal. Has any progress been made in tracking down the reason for this? Have any labmembers successfully used SF6 in amtetcher? From nvgirish at snf.stanford.edu Wed May 27 21:42:15 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 27 May 2009 21:42:15 -0700 Subject: Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error Message-ID: Ran program 3. 15 min conditioning etch ran fine. - After that in the next run during the Wait FLW and Wait PR step, started giving "Turbo Purge OFF" error and process was aborted. - Same happens with Program2. From eenriquez at snf.stanford.edu Thu May 28 14:28:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 May 2009 14:28:19 -0700 Subject: Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error Message-ID: Reset the system. SF6 problem- Defective MFC, need to send out for repair. This is a very old MFC and not easily replaced. Waiting for a quote. From ahryciw at snf.stanford.edu Thu May 28 18:00:53 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Thu, 28 May 2009 18:00:53 -0700 Subject: Problem amtetcher SNF 2009-05-28 18:00:52: "Turbo purge off" alarm Message-ID: Ran recipe 3 (std. oxide) 3 times (chamber season + 2 etches). Each time, initial turbo pumpdown failed due to a "turbo purge off - program 3 ready" alarm. Silenced alarm and ran recipe again. Worked normally thereafter until running next etch after venting (bell jar only open ~3 min.), at which point the "turbo purge off" alarm occurred again. From nvgirish at snf.stanford.edu Thu May 28 23:40:32 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 28 May 2009 23:40:32 -0700 Subject: Problem amtetcher SNF 2009-05-28 23:40:31: "Turbo Purge OFF" error Message-ID: Always gives this error the first time any process is run after venting. Pressing run again fixes it, but during the etch the purge flow is 0 (?) From lwchang at snf.stanford.edu Sun May 31 10:47:08 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sun, 31 May 2009 10:47:08 -0700 Subject: Problem amtetcher SNF 2009-05-31 10:47:08: "Turbo Purge OFF" error Message-ID: same as previous users reported