Problem amtetcher SNF 2009-05-07 15:57:06: No SF6 flow

ahryciw at snf.stanford.edu ahryciw at snf.stanford.edu
Thu May 7 15:57:07 PDT 2009


A new recipe I am trying uses 7 sccm O2 and 70 sccm SF6.  The oxygen flow stabilised quickly during the "Wait Flow" segment of the process, but the SF6 flow did not rise above zero, causing a flow time-out alarm.  The SF6 valve appears to be open behind the tool.  Is there a trick to using SF6 in amtetcher?




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