Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Wed May 27 21:42:15 PDT 2009


Ran program 3. 15 min conditioning etch ran fine. 
- After that in the next run during the Wait FLW and Wait PR step, started    giving "Turbo Purge OFF" error and process was aborted.  
- Same happens with Program2.




More information about the amtetcher-pcs mailing list