Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error

nvgirish at nvgirish at
Wed May 27 21:42:15 PDT 2009

Ran program 3. 15 min conditioning etch ran fine. 
- After that in the next run during the Wait FLW and Wait PR step, started    giving "Turbo Purge OFF" error and process was aborted.  
- Same happens with Program2.

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