Problem amtetcher SNF 2009-05-28 18:00:52: "Turbo purge off" alarm

ahryciw at snf.stanford.edu ahryciw at snf.stanford.edu
Thu May 28 18:00:53 PDT 2009


Ran recipe 3 (std. oxide) 3 times (chamber season + 2 etches).  Each time, initial turbo pumpdown failed due to a "turbo purge off - program 3 ready" alarm.  Silenced alarm and ran recipe again. Worked normally thereafter until running next etch after venting (bell jar only open ~3 min.), at which point the "turbo purge off" alarm occurred again.




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