May 2009 Archives by subject

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Starting: Thu May 7 15:57:07 PDT 2009
Ending: Sun May 31 10:47:08 PDT 2009
Messages: 21

• Comment amtetcher SNF 2009-05-11 11:21:55: Update No SF6   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-05-13 10:01:15: can the observation window be replaced?   quickwin at snf.stanford.edu
• Comment amtetcher SNF 2009-05-13 10:01:15: can the observation window be replaced?   mdickey at snf.stanford.edu
• Comment amtetcher SNF 2009-05-20 21:33:52: large black mark found on top right of 2nd tray - cleaned by Elmer   skoh at snf.stanford.edu
• Comment amtetcher SNF 2009-05-21 22:47:22: Polymer flakes   nharjee at snf.stanford.edu
• Comment amtetcher SNF 2009-05-22 08:43:00: Hexode   mdickey at snf.stanford.edu
• Comment amtetcher SNF 2009-05-22 13:34:25: Wiped down   mdickey at snf.stanford.edu
• Problem amtetcher SNF 2009-05-07 15:57:06: No SF6 flow   ahryciw at snf.stanford.edu
• Problem amtetcher SNF 2009-05-19 18:25:07: found burn marks on topright of 2nd wafer holder   rshyam at snf.stanford.edu
• Problem amtetcher SNF 2009-05-19 18:25:07: found burn marks on topright of 2nd wafer holder   mdickey at snf.stanford.edu
• Problem amtetcher SNF 2009-05-22 12:23:50: polymer flakes   ginel at snf.stanford.edu
• Problem amtetcher SNF 2009-05-22 16:04:51: Still no SF6   ahryciw at snf.stanford.edu
• Problem amtetcher SNF 2009-05-28 18:00:52: "Turbo purge off" alarm   ahryciw at snf.stanford.edu
• Problem amtetcher SNF 2009-05-28 23:40:31: "Turbo Purge OFF" error   nvgirish at snf.stanford.edu
• Problem amtetcher SNF 2009-05-31 10:47:08: "Turbo Purge OFF" error   lwchang at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-11 19:03:34: pressure out of limit error   quickwin at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-11 19:03:34: pressure out of limit error   eenriquez at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-20 10:36:18: Second rack shows sign of arcing   kcbalram at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-20 10:36:18: Second rack shows sign of arcing   mdickey at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error   nvgirish at snf.stanford.edu
• Shutdown amtetcher SNF 2009-05-27 21:42:13: Turbo Purge OFF error   eenriquez at snf.stanford.edu

Last message date: Sun May 31 10:47:08 PDT 2009
Archived on: Fri Jan 11 13:04:30 PST 2013

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