From popomoo at snf.stanford.edu Sun Nov 1 14:19:31 2009 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sun, 1 Nov 2009 14:19:31 -0800 Subject: Comment amtetcher SNF 2009-11-01 14:19:31: vacuum wand doesn't work properly. Message-ID: Once a vaccuum wand is turned on, we need to push the black button to stop sucking. But, now the initail mode is that the black button is already pushed. In order to grap the wafer, you need to pull out the black button. From eenriquez at snf.stanford.edu Mon Nov 2 13:35:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:35:11 -0800 Subject: Comment amtetcher SNF 2009-10-22 16:20:52: Venting timeout Message-ID: No problem found. Vent time = 2.5 min. From eenriquez at snf.stanford.edu Wed Nov 4 15:11:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Nov 2009 15:11:50 -0800 Subject: Comment amtetcher SNF 2009-11-04 15:11:50: Hot loop heater not working Message-ID: The hot loop (bell jar heating) heater is not working. This should not affect the process but it's not a bad idea to check your process. Will need to troubleshoot further. From latta at snf.stanford.edu Thu Nov 5 17:36:16 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Nov 2009 17:36:16 -0800 Subject: Comment amtetcher SNF 2009-11-05 17:36:16: ER check after hot loop down Message-ID: Standard Oxide recipe #3 for 2 mins LTO 333A/min vs 348 in Oct PR 99A/min vs 40 (this may be an odd number, too- other positions run at the same time were 82, 75, 142, 97 and 97) SiN 184A/min vs 221 From jsnapp at snf.stanford.edu Fri Nov 6 22:34:21 2009 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Fri, 6 Nov 2009 22:34:21 -0800 Subject: Problem amtetcher SNF 2009-11-06 22:34:20: tray clamping system chomping at fingers! Message-ID: I was trying to unload dummies and load dummies and I experienced that the clamping system (which you lower by pushing the two big red buttons) to lift up an inch or so and violently slam down again. WITH NO USER REQUEST. This seems to be due to some bleeding of air into the vacuum lines. After it did this a second time to me I decided to save my fingers and call it quits for the night. I consider this to be a fundamental design flaw affecting safety. The system should not be able to change state unless both of the big red buttons are pushed. It shouldn't be both big red buttons OR a malfunction. From cbaxter at snf.stanford.edu Fri Nov 6 22:52:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Nov 2009 22:52:15 -0800 Subject: Problem amtetcher SNF 2009-11-06 22:34:20: tray clamping system chomping at fingers! Message-ID: Adjusted the bleed solenoid.. From jeh0513 at snf.stanford.edu Sat Nov 7 10:13:20 2009 From: jeh0513 at snf.stanford.edu (jeh0513 at snf.stanford.edu) Date: Sat, 7 Nov 2009 10:13:20 -0800 Subject: Problem amtetcher SNF 2009-11-07 10:13:20: AMT is not pumped down Message-ID: From jeh0513 at snf.stanford.edu Sat Nov 7 10:18:04 2009 From: jeh0513 at snf.stanford.edu (jeh0513 at snf.stanford.edu) Date: Sat, 7 Nov 2009 10:18:04 -0800 Subject: Problem amtetcher SNF 2009-11-07 10:18:03: can't pump to base Message-ID: From mislam at snf.stanford.edu Sun Nov 8 14:39:51 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 8 Nov 2009 14:39:51 -0800 Subject: Problem amtetcher SNF 2009-11-08 14:39:51: Won't pump to base Message-ID: won't pump below 0.9mTorr, very slow From cbaxter at snf.stanford.edu Sun Nov 8 22:24:08 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Nov 2009 22:24:08 -0800 Subject: Problem amtetcher SNF 2009-11-07 10:13:20: AMT is not pumped down Message-ID: From cbaxter at snf.stanford.edu Sun Nov 8 22:24:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Nov 2009 22:24:14 -0800 Subject: Problem amtetcher SNF 2009-11-07 10:18:03: can't pump to base Message-ID: From cbaxter at snf.stanford.edu Sun Nov 8 22:26:09 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Nov 2009 22:26:09 -0800 Subject: Problem amtetcher SNF 2009-11-08 14:39:51: Won't pump to base Message-ID: Cleaned belljar o-ring surface and ran process 3 and 2 w/out problem. chamber pumped below .4mt with turbo. From king at snf.stanford.edu Mon Nov 9 15:17:10 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 9 Nov 2009 15:17:10 -0800 Subject: Problem amtetcher SNF 2009-11-09 15:17:09: Wand isn't working Message-ID: Thanks. From mdickey at snf.stanford.edu Tue Nov 10 10:34:27 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 10 Nov 2009 10:34:27 -0800 Subject: Problem amtetcher SNF 2009-11-09 15:17:09: Wand isn't working Message-ID: wand replaced From chelseys at snf.stanford.edu Wed Nov 18 15:57:35 2009 From: chelseys at snf.stanford.edu (chelseys at snf.stanford.edu) Date: Wed, 18 Nov 2009 15:57:35 -0800 Subject: Comment amtetcher SNF 2009-11-18 15:57:34: Holder station hissing Message-ID: The black holder station was hissing while lifting and closing. Also jolting slightly while closed and in the process of changing wafers. Manually holding lid down seemed to help. From ericp at snf.stanford.edu Thu Nov 19 03:26:30 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 19 Nov 2009 03:26:30 -0800 Subject: Problem amtetcher SNF 2009-11-19 03:26:29: extremely high leakup rate Message-ID: Measured leakup rate >40mT/min (following 10 min pumpdown). This might explain some of the high etchrate variation seen lately. From eenriquez at snf.stanford.edu Thu Nov 19 10:05:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Nov 2009 10:05:32 -0800 Subject: Comment amtetcher SNF 2009-11-19 10:05:32: Update high leak rate Message-ID: Vent valve is leaking. Lowered the nitrogen pressure. Leak rate is now around 5 mT/min. Vent time ~ 3.5 min. We will rebuild the valve next week. From eenriquez at snf.stanford.edu Fri Nov 20 08:23:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Nov 2009 08:23:49 -0800 Subject: Problem amtetcher SNF 2009-11-20 08:23:48: Wafer unloader is not working Message-ID: one of the air switch's actuator button broke off. From eenriquez at snf.stanford.edu Fri Nov 20 12:25:02 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Nov 2009 12:25:02 -0800 Subject: Problem amtetcher SNF 2009-11-20 12:25:01: Loader is not working Message-ID: Air switch actuator broke off. The part has been order and should be here next Tuesday.