Comment amtetcher SNF 2009-11-05 17:36:16: ER check after hot loop down

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Nov 5 17:36:16 PST 2009


Standard Oxide recipe #3 for 2 mins
LTO 333A/min vs 348 in Oct
PR 99A/min vs 40 (this may be an odd number, too- other positions run at the same time were 82, 75, 142, 97 and 97)
SiN 184A/min vs 221




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