Problem amtetcher SNF 2009-11-19 03:26:29: extremely high leakup rate

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Nov 19 03:26:30 PST 2009


Measured leakup rate >40mT/min (following 10 min pumpdown). 
This might explain some of the high etchrate variation seen lately. 




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