From eenriquez at snf.stanford.edu Wed Oct 7 18:38:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Oct 2009 18:38:55 -0700 Subject: Comment amtetcher SNF 2009-10-07 18:38:54: Maintenace work Message-ID: Replaced the manometer with a newly calibrated manometer. Installed a newly calibrated SF6 MFC. Able to flow SF6 but the shutoff valve (pneumatic valve) is stuck open. It looks like there is a problem with the digital output board. Will continue to troubleshoot. Shutoff the manual valve and pumped out the SF6 line to ensure that SF6 will not flow in the system. Also need to zero the MFC because it reads 1 sccm with no gas in the line. Took out and measured the quartz viewport port. Will order new windows tomorrow. The new manometer might effect your process. Please qualify your process before comitting your wafers. From eenriquez at snf.stanford.edu Wed Oct 7 18:40:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Oct 2009 18:40:33 -0700 Subject: Problem amtetcher SNF 2009-10-07 18:40:33: Needs qualification Message-ID: The new manometer might effect your process. Please qualify your process before comitting your wafers. Staff will run quals tomorrow. From nharjee at snf.stanford.edu Mon Oct 12 11:42:02 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 12 Oct 2009 11:42:02 -0700 Subject: Problem amtetcher SNF 2009-10-12 11:42:01: Can't pump to base Message-ID: Gets to ~0.89 mT but never reaches 0.8 mT setpoint. Bell jar was up only long enough to inspect hexode (no wafers loaded). Tried wiping down seal and bottom surface of chamber, but no improvement. From eenriquez at snf.stanford.edu Tue Oct 13 13:19:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Oct 2009 13:19:39 -0700 Subject: Problem amtetcher SNF 2009-09-16 12:42:36: can the viewing port be replaced? Message-ID: Replaced the view port window. From eenriquez at snf.stanford.edu Tue Oct 13 13:21:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Oct 2009 13:21:40 -0700 Subject: Comment amtetcher SNF 2009-09-27 13:47:36: Chamber window too cloudy Message-ID: Replaced the view port window From eenriquez at snf.stanford.edu Tue Oct 13 13:21:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Oct 2009 13:21:53 -0700 Subject: Comment amtetcher SNF 2009-10-07 18:38:54: Maintenace work Message-ID: Archive From eenriquez at snf.stanford.edu Tue Oct 13 13:33:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Oct 2009 13:33:49 -0700 Subject: Problem amtetcher SNF 2009-10-12 11:42:01: Can't pump to base Message-ID: Lowered the nitrogen pressure for the vent. Chamber leakrate is now 5 mt/ min; was 88 mt/min before adjusting press. Tried to repair the valve but we did not have the correct size valve tip. Re-used the old tip and will order some new ones. From latta at snf.stanford.edu Tue Oct 13 15:46:00 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:46:00 -0700 Subject: Problem amtetcher SNF 2009-10-07 18:40:33: Needs qualification Message-ID: qual on wiki. Will summarize in comments From latta at snf.stanford.edu Tue Oct 13 15:46:24 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:46:24 -0700 Subject: Problem amtetcher SNF 2009-09-29 19:52:32: undesired gas3 flow Message-ID: false reading- SF6 line is pumped out From latta at snf.stanford.edu Tue Oct 13 15:47:03 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:47:03 -0700 Subject: Problem amtetcher SNF 2009-09-25 14:55:05: Gas 3 (SF6) shows flow.... Message-ID: line has been pumped out- false reading From latta at snf.stanford.edu Tue Oct 13 15:47:23 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:47:23 -0700 Subject: Problem amtetcher SNF 2009-09-23 16:42:58: Needs a process qual Message-ID: posted on wiki From latta at snf.stanford.edu Tue Oct 13 15:47:41 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:47:41 -0700 Subject: Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch Message-ID: line has been pumped out- false reading From latta at snf.stanford.edu Tue Oct 13 15:47:53 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Oct 2009 15:47:53 -0700 Subject: Problem amtetcher SNF 2009-08-20 18:49:55: Gas 3 flow Message-ID: line has been pumped out- false reading From latta at snf.stanford.edu Wed Oct 14 15:03:59 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 15:03:59 -0700 Subject: Comment amtetcher SNF 2009-09-24 17:40:23: Measured Si etch rate Message-ID: Quals posted on wiki. From latta at snf.stanford.edu Wed Oct 14 15:04:21 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 15:04:21 -0700 Subject: Comment amtetcher SNF 2009-10-14 15:04:20: What a pretty new view port! Message-ID: From king at snf.stanford.edu Thu Oct 15 02:03:30 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 15 Oct 2009 02:03:30 -0700 Subject: Comment amtetcher SNF 2009-10-15 02:03:29: AMT bell jar Message-ID: was making odd noises. Maybe air bubbles through the water lines but it sounded strange. From popomoo at snf.stanford.edu Wed Oct 21 13:48:30 2009 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Wed, 21 Oct 2009 13:48:30 -0700 Subject: Problem amtetcher SNF 2009-10-21 13:48:29: rough TC <20 Message-ID: When I came to the machine, its display said 'Rough TC < 20'. And, I vented the chamber, it said 'Rough TC >999'. I asked Nancy about that, and I just started 'procedure #2' Now, rough TC value changes around 100. From eenriquez at snf.stanford.edu Wed Oct 21 18:06:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 18:06:06 -0700 Subject: Problem amtetcher SNF 2009-10-21 13:48:29: rough TC <20 Message-ID: Training issue. The message "rough TC< 20" is just the message displayed when the Pressure button is pressed. The Pressure button, when pressed repeatedly will cycle through and display various pressure gauge readings on the system. From chienyuc at snf.stanford.edu Thu Oct 22 16:20:53 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 22 Oct 2009 16:20:53 -0700 Subject: Comment amtetcher SNF 2009-10-22 16:20:52: Venting timeout Message-ID: Usually takes 10 minutes or longer to vent the chamber. The vent gas flow might be stucked.