Problem amtetcher SNF 2009-10-12 11:42:01: Can't pump to base

nharjee at nharjee at
Mon Oct 12 11:42:02 PDT 2009

Gets to ~0.89 mT but never reaches 0.8 mT setpoint. Bell jar was up only long enough to inspect hexode (no wafers loaded). Tried wiping down seal and bottom surface of chamber, but no improvement.

More information about the amtetcher-pcs mailing list