Problem amtetcher SNF 2009-09-23 16:42:58: Needs a process qual
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Oct 13 15:47:23 PDT 2009
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Problem amtetcher SNF 2009-09-25 14:55:05: Gas 3 (SF6) shows flow....
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Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch
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Problem amtetcher SNF 2009-09-25 14:55:05: Gas 3 (SF6) shows flow....
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Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch
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