Comment amtetcher SNF 2009-10-22 16:20:52: Venting timeout
chienyuc at snf.stanford.edu
chienyuc at snf.stanford.edu
Thu Oct 22 16:20:53 PDT 2009
Usually takes 10 minutes or longer to vent the chamber. The vent gas flow might be stucked.
More information about the amtetcher-pcs
mailing list