September 2009 Archives by author

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Starting: Tue Sep 1 13:11:01 PDT 2009
Ending: Tue Sep 29 19:52:32 PDT 2009
Messages: 48

• Comment amtetcher SNF 2009-09-09 09:26:39: Cooling ok   chienyuc at snf.stanford.edu
• Problem amtetcher SNF 2009-09-09 10:59:10: lower wafer in column 5 unclipping   cmcg at snf.stanford.edu
• Problem amtetcher SNF 2009-09-03 14:44:12: Cold loop too warm   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-09-09 09:26:39: Cooling ok   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-08-30 07:59:29: Program #2 entered ....   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-08-28 13:53:34: Replaced NF3 cylinder   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-08-07 09:46:39: Manometer reading is drifting   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-08-31 10:57:48: Programed   eenriquez at snf.stanford.edu
• Problem amtetcher SNF 2009-09-18 08:32:29: CHF3 is unavailable   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-09-21 12:55:36: CHF3 update   eenriquez at snf.stanford.edu
• Problem amtetcher SNF 2009-09-18 08:32:29: CHF3 is unavailable   eenriquez at snf.stanford.edu
• Comment amtetcher SNF 2009-09-21 12:55:36: CHF3 update   eenriquez at snf.stanford.edu
• Problem amtetcher SNF 2009-09-23 16:42:58: Needs a process qual   eenriquez at snf.stanford.edu
• Problem amtetcher SNF 2009-09-17 02:47:10: wafer clamps badly worn   ericp at snf.stanford.edu
• Comment amtetcher SNF 2009-09-24 17:40:23: Measured Si etch rate   ericp at snf.stanford.edu
• Problem amtetcher SNF 2009-09-03 14:44:12: Cold loop too warm   king at snf.stanford.edu
• Comment amtetcher SNF 2009-09-03 17:14:56: clips are getting worn   king at snf.stanford.edu
• Problem amtetcher SNF 2009-09-11 20:45:45: need new dummy wafers   king at snf.stanford.edu
• Comment amtetcher SNF 2009-08-04 19:07:33: AMT help tonight?   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-04 16:07:21: runs okay   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-04 20:26:29:   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-06 07:10:57: I'll use it if it's working again...   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-06 20:40:38: AMT etch rate   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-07-31 23:28:04: broke one dummy   latta at snf.stanford.edu
• Problem amtetcher SNF 2009-07-06 19:18:37: Still no SF6   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-07-20 09:41:09: Tested   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-07-20 01:30:35:   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-04 14:18:05: Running Rcp 4   latta at snf.stanford.edu
• Problem amtetcher SNF 2009-08-07 05:00:09: Can't pump down to base   latta at snf.stanford.edu
• Problem amtetcher SNF 2009-08-23 17:05:42: Bell Mechanism Halts   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-08-28 12:27:51: Need to reenter recipes   latta at snf.stanford.edu
• Problem amtetcher SNF 2009-09-09 10:59:10: lower wafer in column 5 unclipping   latta at snf.stanford.edu
• Problem amtetcher SNF 2009-09-25 14:55:05: Gas 3 (SF6) shows flow....   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-09-25 14:56:39: clicking sound around belljar   latta at snf.stanford.edu
• Comment amtetcher SNF 2009-09-03 17:14:56: clips are getting worn   mdickey at snf.stanford.edu
• Shutdown amtetcher SNF 2009-09-09 13:33:14: uncliped a wafer of column 5   mdickey at snf.stanford.edu
• Problem amtetcher SNF 2009-09-17 02:47:10: wafer clamps badly worn   mdickey at snf.stanford.edu
• Problem amtetcher SNF 2009-09-29 19:52:32: undesired gas3 flow   mrlin at snf.stanford.edu
• Problem amtetcher SNF 2009-09-16 12:42:36: can the viewing port be replaced?   quickwin at snf.stanford.edu
• Comment amtetcher SNF 2009-09-27 13:47:36: Chamber window too cloudy   renshen at snf.stanford.edu
• Comment amtetcher SNF 2009-09-27 16:36:37: Thermal oxide etch rate   renshen at snf.stanford.edu
• Problem amtetcher SNF 2009-09-11 20:42:28: dummies in terrible shape   rostam at snf.stanford.edu
• Comment amtetcher SNF 2009-09-11 20:49:59: dummies replaced   rostam at snf.stanford.edu
• Problem amtetcher SNF 2009-09-11 20:42:28: dummies in terrible shape   shott at snf.stanford.edu
• Problem amtetcher SNF 2009-09-11 20:45:45: need new dummy wafers   shott at snf.stanford.edu
• Comment amtetcher SNF 2009-09-11 20:49:59: dummies replaced   shott at snf.stanford.edu
• Comment amtetcher SNF 2009-08-04 08:32:55: Bell Jar   shott at snf.stanford.edu
• Shutdown amtetcher SNF 2009-09-09 13:33:14: uncliped a wafer of column 5   sishikaw at snf.stanford.edu

Last message date: Tue Sep 29 19:52:32 PDT 2009
Archived on: Fri Jan 11 13:04:31 PST 2013

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