From filip at snf.stanford.edu Tue Apr 6 00:05:59 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 6 Apr 2010 00:05:59 -0700 Subject: Comment amtetcher SNF 2010-04-06 00:05:59: prog 1 Message-ID: once in a while cannot get to base pressure of 0.8 mT reaches base on 2nd try From chienyuc at snf.stanford.edu Wed Apr 7 20:49:14 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 7 Apr 2010 20:49:14 -0700 Subject: Problem amtetcher SNF 2010-04-07 20:49:12: loader disconnected Message-ID: Not able to lift up/down when pressing the buttons. From king at snf.stanford.edu Wed Apr 7 22:12:16 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 7 Apr 2010 22:12:16 -0700 Subject: Comment amtetcher SNF 2010-04-07 22:12:16: Etch rate is about 10% higher than usual for Pgm 3 Message-ID: I ran two test runs. From cbaxter at snf.stanford.edu Fri Apr 9 13:30:38 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 9 Apr 2010 13:30:38 -0700 Subject: Problem amtetcher SNF 2010-04-07 20:49:12: loader disconnected Message-ID: Mike repaired the bimba cyclinder.. From gyama at snf.stanford.edu Sat Apr 10 11:43:55 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sat, 10 Apr 2010 11:43:55 -0700 Subject: Comment amtetcher SNF 2010-04-10 11:43:54: wand tip fell off Message-ID: From rostam at snf.stanford.edu Mon Apr 12 21:00:11 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 12 Apr 2010 21:00:11 -0700 Subject: Problem amtetcher SNF 2010-04-12 21:00:10: no vacuum wand head Message-ID: the bottom half of the vacuum wand head/tip was broken off. the head/tip came off by itself. Please replace. From mdickey at snf.stanford.edu Tue Apr 13 06:56:44 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Apr 2010 06:56:44 -0700 Subject: Problem amtetcher SNF 2010-04-12 21:00:10: no vacuum wand head Message-ID: wand tip replaced From mdickey at snf.stanford.edu Tue Apr 13 06:56:57 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Apr 2010 06:56:57 -0700 Subject: Comment amtetcher SNF 2010-04-10 11:43:54: wand tip fell off Message-ID: Replaced wand tip From skoh at snf.stanford.edu Tue Apr 13 19:48:30 2010 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 13 Apr 2010 19:48:30 -0700 Subject: Problem amtetcher SNF 2010-04-13 19:48:29: Loader works only intermittently Message-ID: From eenriquez at snf.stanford.edu Wed Apr 14 08:51:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Apr 2010 08:51:24 -0700 Subject: Problem amtetcher SNF 2010-04-13 19:48:29: Loader works only intermittently Message-ID: Adjusted the loader "open" air switch. From rik at snf.stanford.edu Wed Apr 14 23:29:41 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 14 Apr 2010 23:29:41 -0700 Subject: Problem amtetcher SNF 2010-04-14 23:29:41: Clip broken on Tray 1 Message-ID: Tray #1, Topmost wafer slot has a broken clip. Does not hold wafer well. From mdickey at snf.stanford.edu Fri Apr 16 08:03:18 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 16 Apr 2010 08:03:18 -0700 Subject: Problem amtetcher SNF 2010-04-14 23:29:41: Clip broken on Tray 1 Message-ID: replaced clip From damodei at snf.stanford.edu Sun Apr 18 22:54:45 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Sun, 18 Apr 2010 22:54:45 -0700 Subject: Problem amtetcher SNF 2010-04-18 22:54:44: Vacuum wand metal tip broken Message-ID: Someone bent it out of shape and broke it; I found the tip lying on the table. From mdickey at snf.stanford.edu Mon Apr 19 08:20:15 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 19 Apr 2010 08:20:15 -0700 Subject: Problem amtetcher SNF 2010-04-18 22:54:44: Vacuum wand metal tip broken Message-ID: Tip replaced From cursive at snf.stanford.edu Tue Apr 20 08:08:41 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 20 Apr 2010 08:08:41 -0700 Subject: Problem amtetcher SNF 2010-04-20 08:08:40: vaccum wand doesn't work Message-ID: From eenriquez at snf.stanford.edu Tue Apr 20 10:34:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Apr 2010 10:34:17 -0700 Subject: Problem amtetcher SNF 2010-04-20 08:08:40: vaccum wand doesn't work Message-ID: Repaired the vacuum wand. From lindaw at snf.stanford.edu Thu Apr 22 14:50:15 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 22 Apr 2010 14:50:15 -0700 Subject: Problem amtetcher SNF 2010-04-22 14:50:15: alarm! turbo can't pump to base Message-ID: The alarm went off and the message is: TURBO PMPDN 5.89 CANT PMP TO BASE No one has the system enabled. From eenriquez at snf.stanford.edu Fri Apr 23 08:58:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Apr 2010 08:58:24 -0700 Subject: Problem amtetcher SNF 2010-04-22 14:50:15: alarm! turbo can't pump to base Message-ID: The standby recipe (#2) had been changed. Reprogrammed the recipe so that it cleans the chamber, conditions and leaves the chamber in a pumped down state. From jwpchen at snf.stanford.edu Tue Apr 27 04:49:55 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 27 Apr 2010 04:49:55 -0700 Subject: Comment amtetcher SNF 2010-04-27 04:49:55: tray6 Message-ID: noticed loose screws behind tray6 slot4 From mdickey at snf.stanford.edu Tue Apr 27 07:12:22 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 27 Apr 2010 07:12:22 -0700 Subject: Comment amtetcher SNF 2010-04-27 04:49:55: tray6 Message-ID: screws tightened From ginel at snf.stanford.edu Tue Apr 27 08:33:08 2010 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:33:08 -0700 Subject: Problem amtetcher SNF 2010-04-27 08:33:07: wand not working Message-ID: not enough suction From eenriquez at snf.stanford.edu Wed Apr 28 08:53:11 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2010 08:53:11 -0700 Subject: Problem amtetcher SNF 2010-04-27 08:33:07: wand not working Message-ID: Replaced the missing spring inside the wand. Please do not disassemble the wand. This is the third time that this has happened.