From eenriquez at snf.stanford.edu Tue Aug 3 13:14:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Aug 2010 13:14:04 -0700 Subject: Comment amtetcher SNF 2010-06-13 02:22:32: turbo recovered. Message-ID: Archived From chienyuc at snf.stanford.edu Tue Aug 3 16:25:52 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 3 Aug 2010 16:25:52 -0700 Subject: Comment amtetcher SNF 2010-08-03 16:25:51: Gas 5 won't close in program 2 Message-ID: Not the usual holding step in the standby mode. Please check if there is any problem. From meiyueht at snf.stanford.edu Wed Aug 4 22:28:44 2010 From: meiyueht at snf.stanford.edu (meiyueht at snf.stanford.edu) Date: Wed, 4 Aug 2010 22:28:44 -0700 Subject: Problem amtetcher SNF 2010-08-04 22:28:43: gas 5 won't close Message-ID: When process 1 ended, it said that gas 5 won't close. We had to "abort" in order to vent the chamber. From eenriquez at snf.stanford.edu Thu Aug 5 11:58:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Aug 2010 11:58:30 -0700 Subject: Comment amtetcher SNF 2010-08-05 11:58:30: Update Message-ID: MFC 5 (NF3) reading is taking too long to go to zero. Need to replace the shut-off valve. OK to use the tool. If problem occurs, clear the alarm and press the Run button again. From latta at snf.stanford.edu Fri Aug 6 13:28:54 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:28:54 -0700 Subject: Comment amtetcher SNF 2010-08-03 16:25:51: Gas 5 won't close in program 2 Message-ID: see update in comments From latta at snf.stanford.edu Fri Aug 6 13:29:06 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:29:06 -0700 Subject: Problem amtetcher SNF 2010-08-04 22:28:43: gas 5 won't close Message-ID: see update in comments From chienyuc at snf.stanford.edu Thu Aug 12 12:25:28 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 12 Aug 2010 12:25:28 -0700 Subject: Shutdown amtetcher SNF 2010-08-12 12:25:27: power off Message-ID: Power turned off during unloading wafers. Not sure what happened. From mdickey at snf.stanford.edu Thu Aug 12 13:15:48 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Aug 2010 13:15:48 -0700 Subject: Shutdown amtetcher SNF 2010-08-12 12:25:27: power off Message-ID: reset bell jar breaker and reset the system. Not sure why it tripped. From mdickey at snf.stanford.edu Thu Aug 12 13:29:39 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Aug 2010 13:29:39 -0700 Subject: Shutdown amtetcher SNF 2010-08-12 13:29:39: constant check Message-ID: Need to check system constants before running From mdickey at snf.stanford.edu Thu Aug 12 13:41:48 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Aug 2010 13:41:48 -0700 Subject: Shutdown amtetcher SNF 2010-08-12 13:29:39: constant check Message-ID: constants ok From chienyuc at snf.stanford.edu Mon Aug 16 13:31:47 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Mon, 16 Aug 2010 13:31:47 -0700 Subject: Problem amtetcher SNF 2010-08-16 13:31:47: high hex temperature Message-ID: After the power outage, noticed the machine is stucked in cooling hex step and the temperature is 28C - cannot proceed. From eenriquez at snf.stanford.edu Mon Aug 16 14:57:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2010 14:57:30 -0700 Subject: Problem amtetcher SNF 2010-08-16 13:31:47: high hex temperature Message-ID: The heat exchanger off because it was under repair. From mdickey at snf.stanford.edu Thu Aug 19 07:55:48 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Aug 2010 07:55:48 -0700 Subject: Comment amtetcher SNF 2010-08-19 07:55:48: tray clips Message-ID: Replace almost all the tray clips.(94) Tightened all tray overlays. From latta at snf.stanford.edu Fri Aug 20 15:06:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Aug 2010 15:06:45 -0700 Subject: Comment amtetcher SNF 2010-08-20 15:06:44: Dummies changed Message-ID: Thanks to Mary Calarrudo. From nharjee at snf.stanford.edu Fri Aug 20 17:02:18 2010 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Fri, 20 Aug 2010 17:02:18 -0700 Subject: Problem amtetcher SNF 2010-08-20 17:02:17: Broken clip Message-ID: A clip broke while previous user was loading new dummies. Tray 1, slot 4, bottom right. No arcing observed with only 3 clips. Proceed with caution. From mtan at snf.stanford.edu Sun Aug 22 10:33:18 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 22 Aug 2010 10:33:18 -0700 Subject: Problem amtetcher SNF 2010-08-22 10:33:17: gas 3 flow Message-ID: Machine reported a 1cc flow of SF6 when the chamber is open. The SF6 flow was also detected during operation when the recipe was set to have a 0 flow of SF6. From mdickey at snf.stanford.edu Mon Aug 23 06:58:04 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 Aug 2010 06:58:04 -0700 Subject: Problem amtetcher SNF 2010-08-20 17:02:17: Broken clip Message-ID: Clip replaced From eenriquez at snf.stanford.edu Mon Aug 23 08:53:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Aug 2010 08:53:16 -0700 Subject: Problem amtetcher SNF 2010-08-22 10:33:17: gas 3 flow Message-ID: MFC zeroed drifted. Pumped out the gas line and re-zeroed the MFC. From zeyuan at snf.stanford.edu Thu Aug 26 00:05:58 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Thu, 26 Aug 2010 00:05:58 -0700 Subject: Comment amtetcher SNF 2010-08-26 00:05:57: Window needs cleaning Message-ID: Hard to detect endpoint. Window needs cleaning/replacement. From jwpchen at snf.stanford.edu Fri Aug 27 04:38:15 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 27 Aug 2010 04:38:15 -0700 Subject: Problem amtetcher SNF 2010-08-27 04:38:14: broken clip tray1 slot1 Message-ID: arrived at machine to find clip missing from tray1 slot1, no previous report so can assume previous user broke it. use with caution From mdickey at snf.stanford.edu Fri Aug 27 06:44:11 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 Aug 2010 06:44:11 -0700 Subject: Problem amtetcher SNF 2010-08-27 04:38:14: broken clip tray1 slot1 Message-ID: clip replaced From eenriquez at snf.stanford.edu Mon Aug 30 07:58:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 07:58:47 -0700 Subject: Comment amtetcher SNF 2010-08-30 07:58:46: Update window dirty Message-ID: Cleaned the window. Will clean the window during the next monthly PM. From zeyuan at snf.stanford.edu Tue Aug 31 21:34:34 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Tue, 31 Aug 2010 21:34:34 -0700 Subject: Comment amtetcher SNF 2010-08-31 21:34:33: Check programs before use Message-ID: Program4 which I am using has been changed dramatically, e.g. cryo pump is turned on, etc. Be careful and check programs before use.