Problem amtetcher SNF 2010-08-04 22:28:43: gas 5 won't close

meiyueht at snf.stanford.edu meiyueht at snf.stanford.edu
Wed Aug 4 22:28:44 PDT 2010


When process 1 ended, it said that gas 5 won't close. We had to "abort" in order to vent the chamber. 




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