Problem amtetcher SNF 2010-08-22 10:33:17: gas 3 flow

mtan at snf.stanford.edu mtan at snf.stanford.edu
Sun Aug 22 10:33:18 PDT 2010


Machine reported a 1cc flow of SF6 when the chamber is open.  
The SF6 flow was also detected during operation when the recipe was set to have a 0 flow of SF6.




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