From chienyuc at snf.stanford.edu Sat Dec 4 13:49:52 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sat, 4 Dec 2010 13:49:52 -0800 Subject: Shutdown amtetcher SNF 2010-12-04 13:49:51: mechanical pump off Message-ID: After two normal runs of program 3, I started another process but the rough pumping fails due to mechanical pump off. Later the turbo pump automatically went off and now the chamber is left vented. From cbaxter at snf.stanford.edu Sun Dec 5 09:57:30 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 5 Dec 2010 09:57:30 -0800 Subject: Shutdown amtetcher SNF 2010-12-04 13:49:51: mechanical pump off Message-ID: The main backing pump tripped, needed to reset the system to start the backing pump on. Ran recipe#2 twice w/out problem. From npapte at snf.stanford.edu Sun Dec 5 18:21:24 2010 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 5 Dec 2010 18:21:24 -0800 Subject: Problem amtetcher SNF 2010-12-05 18:21:23: chamber does not vent Message-ID: the chamber does not vent even after 20 minutes of venting From dongrip at snf.stanford.edu Sun Dec 5 19:20:35 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 5 Dec 2010 19:20:35 -0800 Subject: Problem amtetcher SNF 2010-12-05 19:20:34: flow out limit problem Message-ID: Without venting, I attempted to season the chamber with prog. 3, but flow out limit problem appeared and couldn't go further. From mdickey at snf.stanford.edu Mon Dec 6 07:24:51 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 6 Dec 2010 07:24:51 -0800 Subject: Comment amtetcher SNF 2010-12-06 07:24:51: air line Message-ID: Found a cracked air line. Fixed leak, running recipe 2 From npapte at snf.stanford.edu Mon Dec 6 13:26:48 2010 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Mon, 6 Dec 2010 13:26:48 -0800 Subject: Shutdown amtetcher SNF 2010-12-06 13:26:47: turbo went off Message-ID: started seasoning chamber for process #3. However, turbo pump went off within the first minute of the run. From eenriquez at snf.stanford.edu Mon Dec 6 14:35:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2010 14:35:35 -0800 Subject: Shutdown amtetcher SNF 2010-12-06 13:26:47: turbo went off Message-ID: Bell jar did not go all the way down. When the system tried to pumpdown the chamber, the roughing/ foreline pump was overloaded and shut-off. The turbo shutdown because the foreline pump had turned off. From eenriquez at snf.stanford.edu Mon Dec 6 14:36:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2010 14:36:02 -0800 Subject: Problem amtetcher SNF 2010-12-05 19:20:34: flow out limit problem Message-ID: Ran program 3 several times without any problems. From eenriquez at snf.stanford.edu Mon Dec 6 14:36:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2010 14:36:32 -0800 Subject: Problem amtetcher SNF 2010-12-05 18:21:23: chamber does not vent Message-ID: Need to enable the chamber. From eenriquez at snf.stanford.edu Mon Dec 6 14:36:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2010 14:36:41 -0800 Subject: Comment amtetcher SNF 2010-12-06 07:24:51: air line Message-ID: Archive From jimkruger at snf.stanford.edu Mon Dec 6 17:24:46 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 6 Dec 2010 17:24:46 -0800 Subject: Comment amtetcher SNF 2010-12-06 17:24:45: Bell jar lift needs attention Message-ID: The lift has become troublesome. To close: Lower bell jar as usual, but it goes too far such that the black arm may touch the top of the bell jar. This can cause a bad seal, the roughing will take too long, the foreline will go too high and the Turbo will fault out. To avoid this, before RUN, tweak the "bell up" until you see daylight between BOTH GAPS: the bell jar lift flange to lifter, and the black arm to the top of the bell jar. It make take several attempts, opening and re-closing, it is touchy. jimkruger From damodei at snf.stanford.edu Mon Dec 6 22:00:02 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Mon, 6 Dec 2010 22:00:02 -0800 Subject: Problem amtetcher SNF 2010-12-06 22:00:01: Turbo Pump Message-ID: Tried to follow the instructions in Jim's note on the bell jar lift, but turbo pump still not working (i.e. probably a leak somewhere) From eenriquez at snf.stanford.edu Tue Dec 7 14:32:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Dec 2010 14:32:33 -0800 Subject: Shutdown amtetcher SNF 2010-12-07 14:32:33: Installed new turbo pump Message-ID: Completed installing a new turbo pump. Need to replace a few burnt overlay insulators and test the system. From eenriquez at snf.stanford.edu Wed Dec 8 18:44:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2010 18:44:17 -0800 Subject: Comment amtetcher SNF 2010-12-08 18:44:17: Update Message-ID: Problem with the turbo purge: Replaced the nupro valve. No power from the RF generator - Connected to a dummy load and still did not indicate any power output. Still troubleshooting but it looks like the generator is dead. From eenriquez at snf.stanford.edu Thu Dec 9 14:58:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2010 14:58:38 -0800 Subject: Shutdown amtetcher SNF 2010-12-07 14:32:33: Installed new turbo pump Message-ID: Replaced tray and hexode insulators. Replaced a burnt fuse in the RF generator's power amp section. Nancy is now running a qual. From eenriquez at snf.stanford.edu Thu Dec 9 14:59:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2010 14:59:25 -0800 Subject: Comment amtetcher SNF 2010-12-08 18:44:17: Update Message-ID: Replaced a fuse in the generator's power amp section. Now Nancy is running a qual. From eenriquez at snf.stanford.edu Thu Dec 9 14:59:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2010 14:59:42 -0800 Subject: Problem amtetcher SNF 2010-12-06 22:00:01: Turbo Pump Message-ID: Replaced the turbo pump. From eenriquez at snf.stanford.edu Thu Dec 9 15:05:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2010 15:05:56 -0800 Subject: Problem amtetcher SNF 2010-12-09 15:05:55: Noisy gate valve Message-ID: Gate valve is noisy but it appears to be functional. We will repair it tomorrow morning. From latta at snf.stanford.edu Thu Dec 9 15:12:15 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Dec 2010 15:12:15 -0800 Subject: Comment amtetcher SNF 2010-12-09 15:12:15: Quick ox ER run- ok Message-ID: Prog #3 2 mins Thermal ox ER = 342A/min Will do a more complete ER test set tomorrow. Use at your own risk. From latta at snf.stanford.edu Thu Dec 9 15:12:28 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Dec 2010 15:12:28 -0800 Subject: Comment amtetcher SNF 2010-12-06 17:24:45: Bell jar lift needs attention Message-ID: fixed From latta at snf.stanford.edu Thu Dec 9 15:12:51 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Dec 2010 15:12:51 -0800 Subject: Comment amtetcher SNF 2010-11-24 17:26:32: High hexode temp error Message-ID: Hex for last run was at 27C From cursive at snf.stanford.edu Thu Dec 9 17:37:04 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 9 Dec 2010 17:37:04 -0800 Subject: Problem amtetcher SNF 2010-12-09 17:37:04: low DC Bias Message-ID: running #3 setting/ real=-530/-250 From karthikv at snf.stanford.edu Thu Dec 9 18:34:59 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 9 Dec 2010 18:34:59 -0800 Subject: Shutdown amtetcher SNF 2010-12-09 18:34:58: Trays burnt Message-ID: I ran Prog #3 seasoning for 15mins and machine got to the etch step and gave pressure out of tol error. On venting and opening the bell I saw two of the trays completely burnt at the top and the plastic fused together. The chamber is smells of burnt plastic on opening From eenriquez at snf.stanford.edu Fri Dec 10 11:11:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Dec 2010 11:11:42 -0800 Subject: Shutdown amtetcher SNF 2010-12-09 18:34:58: Trays burnt Message-ID: Repaired the gate valve and replaced two worn trays. From eenriquez at snf.stanford.edu Fri Dec 10 11:13:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Dec 2010 11:13:01 -0800 Subject: Problem amtetcher SNF 2010-12-09 15:05:55: Noisy gate valve Message-ID: Repaired the gate valve. From latta at snf.stanford.edu Fri Dec 10 15:19:24 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Dec 2010 15:19:24 -0800 Subject: Problem amtetcher SNF 2010-12-09 17:37:04: low DC Bias Message-ID: DC bias fine during test run, -535. Low bias might be due to arcing From latta at snf.stanford.edu Fri Dec 10 15:23:13 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Dec 2010 15:23:13 -0800 Subject: Comment amtetcher SNF 2010-12-10 15:23:12: Another quick ER test Message-ID: after gate valve replaced, two trays replaced because they were loose Prog #3, tray 1, position 2 Thermal ox ER = 329A/min From latta at snf.stanford.edu Fri Dec 10 15:24:47 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Dec 2010 15:24:47 -0800 Subject: Problem amtetcher SNF 2010-12-10 15:24:46: Tray #2 is loose- avoid using it Message-ID: And check that the top of the hex is nice and flat (tray clips not depressed).to avoid possible arcing. From eenriquez at snf.stanford.edu Mon Dec 13 08:43:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2010 08:43:49 -0800 Subject: Problem amtetcher SNF 2010-12-10 15:24:46: Tray #2 is loose- avoid using it Message-ID: Mike replaced the tray.