Shutdown amtetcher SNF 2010-12-09 18:34:58: Trays burnt

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Thu Dec 9 18:34:59 PST 2010


I ran Prog #3 seasoning for 15mins and machine got to the etch step and gave pressure out of tol error. On venting and opening the bell I saw two of the trays completely burnt at the top and the plastic fused together. The chamber is smells of burnt plastic on opening




More information about the amtetcher-pcs mailing list