From jsnapp at snf.stanford.edu Fri Feb 12 19:42:24 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Fri, 12 Feb 2010 19:42:24 -0800 Subject: Shutdown amtetcher SNF 2010-02-12 19:42:23: All power lost to tool Message-ID: Was lowering bell jar when all power was lost to the tool. Bell jar almost but not quite all the way down. Valuable SOI wafers in tool. Please unload into wafer box on the rack above wafer tray loader before running the tool! Thanks! Justin (jsnapp) From cbaxter at snf.stanford.edu Sun Feb 14 21:27:07 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 14 Feb 2010 21:27:07 -0800 Subject: Shutdown amtetcher SNF 2010-02-12 19:42:23: All power lost to tool Message-ID: System reset by itself, power system back up and hard time booting up the system software. removed cpu and adio and reseated. checked you recipe before running the tool.. From jsnapp at snf.stanford.edu Mon Feb 15 12:48:43 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Mon, 15 Feb 2010 12:48:43 -0800 Subject: Problem amtetcher SNF 2010-02-15 12:48:43: couldn't run standby process 2 and other issues Message-ID: I had to reprogam in the process I wanted (process 4) and and the standby process 2. I was able to season the chamber for 15 minutes and run prgrm 4 on my wafers ok. I did receive several time-outs during venting after my run. Process 2 keeps timing out with an error about a turbo pump leak. Not sure if I misprogrammed procees 2, it is quite long, but I did triple check it. Also, I noticed the screws that hold the clip end of the latch for hexode tray #4 are lose which means the latch doesn't sit quite flush with the surface. That is something that should be fixed before the clip end of the latch comes completely off. From jsnapp at snf.stanford.edu Mon Feb 15 12:50:25 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Mon, 15 Feb 2010 12:50:25 -0800 Subject: Comment amtetcher SNF 2010-02-15 12:50:24: Programs need to be reentered Message-ID: I attempted to input programs 4 and program 2. Everyone should double check their programs before running. Only programs 4 and 2 are entered (hopefully without error). All other programs are not programed currently. From rshyam at snf.stanford.edu Tue Feb 16 00:50:46 2010 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 16 Feb 2010 00:50:46 -0800 Subject: Comment amtetcher SNF 2010-02-16 00:50:46: wrote program 3 Message-ID: From mdickey at snf.stanford.edu Tue Feb 16 07:58:33 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 16 Feb 2010 07:58:33 -0800 Subject: Comment amtetcher SNF 2010-02-15 12:50:24: Programs need to be reentered Message-ID: Entered recipes 1 thru 5 From mdickey at snf.stanford.edu Tue Feb 16 12:45:24 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 16 Feb 2010 12:45:24 -0800 Subject: Comment amtetcher SNF 2010-02-16 12:45:23: tray 4 Message-ID: adjusted tray 4 From latta at snf.stanford.edu Tue Feb 16 14:22:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:22:59 -0800 Subject: Comment amtetcher SNF 2010-02-16 14:22:58: reprogramed 3 and 4 to remove cryo step Message-ID: and put copies in positions 13 and 14. From latta at snf.stanford.edu Tue Feb 16 14:23:39 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 14:23:39 -0800 Subject: Comment amtetcher SNF 2010-02-16 00:50:46: wrote program 3 Message-ID: re-wrote to remove cryo (y) step From dasgupta at snf.stanford.edu Tue Feb 16 16:31:06 2010 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Tue, 16 Feb 2010 16:31:06 -0800 Subject: Problem amtetcher SNF 2010-02-16 16:31:06: Program 2 failed Message-ID: After succesfully completing my etches, I tried to run program 2 but it did not appear to work. After a short period it was stuck in a "hold" position, when I hit run again, it gave an error message about the turbo pump purge and did not appear to run any plasma. From tura at snf.stanford.edu Tue Feb 16 20:32:27 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 16 Feb 2010 20:32:27 -0800 Subject: Comment amtetcher SNF 2010-02-16 20:32:26: Turbo Purge Error Message-ID: The first time I ran my recipe (#7), it stopped ~5min into the etch with turbo purge error. After that it was fine. From zzp at snf.stanford.edu Tue Feb 16 23:41:55 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 16 Feb 2010 23:41:55 -0800 Subject: Comment amtetcher SNF 2010-02-16 23:41:54: Turbo Purge High Message-ID: It failed twice; only the third run finished successfully. From tura at snf.stanford.edu Wed Feb 17 16:15:27 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 17 Feb 2010 16:15:27 -0800 Subject: Problem amtetcher SNF 2010-02-17 16:15:26: Turbo Purge High Message-ID: It randomly stops during the etch with "turbo purge high" error. It's very annoying because you don't know how much of the etch has been completed. The etch needs to be monitored constantly. From cmcg at snf.stanford.edu Wed Feb 17 23:07:31 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 17 Feb 2010 23:07:31 -0800 Subject: Problem amtetcher SNF 2010-02-17 23:07:30: turbo purge high Message-ID: same error as reported by previous users. From zpatel at snf.stanford.edu Thu Feb 18 10:34:33 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 18 Feb 2010 10:34:33 -0800 Subject: Comment amtetcher SNF 2010-02-18 10:34:32: found a broken wafer (dummy) on the bench Message-ID: Found a broken dummy wafer on the bench From zpatel at snf.stanford.edu Thu Feb 18 15:19:08 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 18 Feb 2010 15:19:08 -0800 Subject: Comment amtetcher SNF 2010-02-18 15:19:07: Turbo purge high error Message-ID: Turbo purge high error causes additional delay and time usage of the machine. A big inconvinience. From zpatel at snf.stanford.edu Thu Feb 18 16:02:58 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 18 Feb 2010 16:02:58 -0800 Subject: Comment amtetcher SNF 2010-02-18 16:02:56: Dummies loaded incorrectly and tool not on standby program by previous user Message-ID: From zpatel at snf.stanford.edu Thu Feb 18 16:22:05 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 18 Feb 2010 16:22:05 -0800 Subject: Comment amtetcher SNF 2010-02-18 16:22:04: Vacuum tweezer broken Message-ID: Looks bent too From tura at snf.stanford.edu Thu Feb 18 17:34:31 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 18 Feb 2010 17:34:31 -0800 Subject: Comment amtetcher SNF 2010-02-18 17:34:31: Purge flow high Message-ID: I noticed that whenever it gives the "Turbo Purge High" Error, the purge flow reads 12cc with setpoint at 10cc. From tura at snf.stanford.edu Thu Feb 18 17:38:32 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 18 Feb 2010 17:38:32 -0800 Subject: Comment amtetcher SNF 2010-02-18 17:38:32: recipe #2 holds before etches start Message-ID: recipe #2 used to hold after it completes the 4 etches, now it holds before the etches. From mdickey at snf.stanford.edu Fri Feb 19 07:50:42 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 19 Feb 2010 07:50:42 -0800 Subject: Comment amtetcher SNF 2010-02-19 07:50:42: recipe 2 Message-ID: Had to reprogram recipe 2. At the end of the recipe it gives a message for high turbo purge but is otherwise usable From mdickey at snf.stanford.edu Fri Feb 19 10:49:50 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 19 Feb 2010 10:49:50 -0800 Subject: Comment amtetcher SNF 2010-02-18 16:22:04: Vacuum tweezer broken Message-ID: replaced From tura at snf.stanford.edu Mon Feb 22 20:00:14 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Mon, 22 Feb 2010 20:00:14 -0800 Subject: Comment amtetcher SNF 2010-02-22 20:00:13: Please do not change recipe 3 Message-ID: Servo Pressure of recipe 3 was 20mT when I found the machine (It's supposed to be 40mT) From ocakkaya at snf.stanford.edu Tue Feb 23 03:34:53 2010 From: ocakkaya at snf.stanford.edu (ocakkaya at snf.stanford.edu) Date: Tue, 23 Feb 2010 03:34:53 -0800 Subject: Comment amtetcher SNF 2010-02-23 03:34:53: Turbo purge high error during recipe #3 Message-ID: From chingmei at snf.stanford.edu Wed Feb 24 10:57:41 2010 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Wed, 24 Feb 2010 10:57:41 -0800 Subject: Comment amtetcher SNF 2010-02-24 10:57:40: please don't change standard recipe Message-ID: Just notice someone changed the recipe 3 power from RF1600W to 1200W From rshyam at snf.stanford.edu Fri Feb 26 01:24:01 2010 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 26 Feb 2010 01:24:01 -0800 Subject: Comment amtetcher SNF 2010-02-26 01:24:01: Got the turbo purge high error Message-ID: Recipe #4 From eenriquez at snf.stanford.edu Fri Feb 26 10:04:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Feb 2010 10:04:48 -0800 Subject: Comment amtetcher SNF 2010-02-26 10:04:47: Turbo purge update Message-ID: Turbo purge looks very stable at 10 sccm. Adjusted the turbo purge alarm delay. From jwpchen at snf.stanford.edu Fri Feb 26 15:04:11 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 26 Feb 2010 15:04:11 -0800 Subject: Comment amtetcher SNF 2010-02-26 15:04:10: burn mark tray 2 near latch Message-ID: this one looks newer, older burn marks on other trays From jwpchen at snf.stanford.edu Fri Feb 26 15:34:59 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 26 Feb 2010 15:34:59 -0800 Subject: Comment amtetcher SNF 2010-02-26 15:34:58: turbo purge at 12 Message-ID: turbo purge at 12 during entire prog 3 etch step... not erroring out maybe because alarm delay was changed From jwpchen at snf.stanford.edu Fri Feb 26 16:25:58 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 26 Feb 2010 16:25:58 -0800 Subject: Problem amtetcher SNF 2010-02-26 16:25:57: burn mark tray 1 latch Message-ID: new burn mark appeared after my run on tray 1... also noticed trays 1, 2, and 5 get warmer than the other ones. didn't see abnormal power/voltage/arcing during my run From cbaxter at snf.stanford.edu Sat Feb 27 09:01:59 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 27 Feb 2010 09:01:59 -0800 Subject: Problem amtetcher SNF 2010-02-26 16:25:57: burn mark tray 1 latch Message-ID: Changed the ardel shield on the tray#1