Shutdown amtetcher SNF 2010-02-12 19:42:23: All power lost to tool

jsnapp at snf.stanford.edu jsnapp at snf.stanford.edu
Fri Feb 12 19:42:24 PST 2010


Was lowering bell jar when all power was lost to the tool.  Bell jar almost but not quite all the way down.
Valuable SOI wafers in tool. Please unload into wafer box on the rack above wafer tray loader before running the tool!  Thanks!
Justin (jsnapp) 




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