Problem amtetcher SNF 2010-02-15 12:48:43: couldn't run standby process 2 and other issues

jsnapp at jsnapp at
Mon Feb 15 12:48:43 PST 2010

I had to reprogam in the process I wanted (process 4) and and the standby process 2. I was able to season the chamber for 15 minutes and run prgrm 4 on my wafers ok. I did receive several time-outs during venting after my run.
Process 2 keeps timing out with an error about a turbo pump leak.  Not sure if I misprogrammed procees 2, it is quite long, but I did triple check it.
Also, I noticed the screws that hold the clip end of the latch for hexode tray #4 are lose which means the latch doesn't sit quite flush with the surface.  That is something that should be fixed before the clip end of the latch comes completely off.

More information about the amtetcher-pcs mailing list