Problem amtetcher SNF 2010-02-16 16:31:06: Program 2 failed

dasgupta at snf.stanford.edu dasgupta at snf.stanford.edu
Tue Feb 16 16:31:06 PST 2010


After succesfully completing my etches, I tried to run program 2 but it did not appear to work.  After a short period it was stuck in a "hold" position, when I hit run again, it gave an error message about the turbo pump purge and did not appear to run any plasma.




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