Comment amtetcher SNF 2010-02-16 20:32:26: Turbo Purge Error

tura at snf.stanford.edu tura at snf.stanford.edu
Tue Feb 16 20:32:27 PST 2010


The first time I ran my recipe (#7), it stopped ~5min into the etch with turbo purge error. After that it was fine.




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