Problem amtetcher SNF 2010-02-17 16:15:26: Turbo Purge High

tura at snf.stanford.edu tura at snf.stanford.edu
Wed Feb 17 16:15:27 PST 2010


It randomly stops during the etch with "turbo purge high" error. It's very annoying because you don't know how much of the etch has been completed. The etch needs to be monitored constantly.




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