Problem amtetcher SNF 2010-02-17 23:07:30: turbo purge high
cmcg at snf.stanford.edu
cmcg at snf.stanford.edu
Wed Feb 17 23:07:31 PST 2010
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Problem amtetcher SNF 2010-02-17 16:15:26: Turbo Purge High
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Comment amtetcher SNF 2010-02-18 10:34:32: found a broken wafer (dummy) on the bench
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same error as reported by previous users.
Previous message:
Problem amtetcher SNF 2010-02-17 16:15:26: Turbo Purge High
Next message:
Comment amtetcher SNF 2010-02-18 10:34:32: found a broken wafer (dummy) on the bench
Messages sorted by:
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