Comment amtetcher SNF 2010-01-19 17:52:27: Good result

king at snf.stanford.edu king at snf.stanford.edu
Tue Jan 19 17:52:27 PST 2010


Thermal oxide etch rate over 5 min gave 406 A/min.  Usual rate is around 396 A/min for the same test.  Thanks all!




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