From eenriquez at snf.stanford.edu Tue Mar 2 08:05:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:05:56 -0800 Subject: Comment amtetcher SNF 2010-02-16 12:45:23: tray 4 Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:06:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:06:12 -0800 Subject: Problem amtetcher SNF 2010-02-15 12:48:43: couldn't run standby process 2 and other issues Message-ID: Mike adjusted tray 4 From eenriquez at snf.stanford.edu Tue Mar 2 08:06:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:06:24 -0800 Subject: Comment amtetcher SNF 2010-02-16 14:22:58: reprogramed 3 and 4 to remove cryo step Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:07:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:07:19 -0800 Subject: Problem amtetcher SNF 2010-02-16 16:31:06: Program 2 failed Message-ID: Adjusted the turbo pump purge delay time From eenriquez at snf.stanford.edu Tue Mar 2 08:07:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:07:44 -0800 Subject: Comment amtetcher SNF 2010-02-16 20:32:26: Turbo Purge Error Message-ID: Adjusted the turbo pump purge delay time From eenriquez at snf.stanford.edu Tue Mar 2 08:07:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:07:52 -0800 Subject: Comment amtetcher SNF 2010-02-16 23:41:54: Turbo Purge High Message-ID: Archive From eenriquez at snf.stanford.edu Tue Mar 2 08:07:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:07:58 -0800 Subject: Problem amtetcher SNF 2010-02-17 16:15:26: Turbo Purge High Message-ID: Adjusted the turbo pump purge delay time From eenriquez at snf.stanford.edu Tue Mar 2 08:08:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:08:21 -0800 Subject: Problem amtetcher SNF 2010-02-17 23:07:30: turbo purge high Message-ID: Adjusted the turbo pump purge delay time From eenriquez at snf.stanford.edu Tue Mar 2 08:08:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:08:31 -0800 Subject: Comment amtetcher SNF 2010-02-18 15:19:07: Turbo purge high error Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:08:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:08:58 -0800 Subject: Comment amtetcher SNF 2010-02-18 10:34:32: found a broken wafer (dummy) on the bench Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:09:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:09:08 -0800 Subject: Comment amtetcher SNF 2010-02-18 16:02:56: Dummies loaded incorrectly and tool not on standby program by previous user Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:12:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:12:10 -0800 Subject: Comment amtetcher SNF 2010-02-24 10:57:40: please don't change standard recipe Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:15:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:15:03 -0800 Subject: Comment amtetcher SNF 2010-02-18 17:38:32: recipe #2 holds before etches start Message-ID: Reprogramed recipe 2 From eenriquez at snf.stanford.edu Tue Mar 2 08:15:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:15:10 -0800 Subject: Comment amtetcher SNF 2010-02-19 07:50:42: recipe 2 Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:15:34 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:15:34 -0800 Subject: Comment amtetcher SNF 2010-02-26 01:24:01: Got the turbo purge high error Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 2 08:16:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:16:49 -0800 Subject: Comment amtetcher SNF 2010-02-26 15:04:10: burn mark tray 2 near latch Message-ID: Cleaned burn mark From eenriquez at snf.stanford.edu Tue Mar 2 08:17:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:17:05 -0800 Subject: Comment amtetcher SNF 2010-02-23 03:34:53: Turbo purge high error during recipe #3 Message-ID: Archive From eenriquez at snf.stanford.edu Tue Mar 2 08:17:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:17:14 -0800 Subject: Comment amtetcher SNF 2010-02-22 20:00:13: Please do not change recipe 3 Message-ID: Archive From eenriquez at snf.stanford.edu Tue Mar 2 08:17:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:17:31 -0800 Subject: Comment amtetcher SNF 2010-02-18 17:34:31: Purge flow high Message-ID: Archive From eenriquez at snf.stanford.edu Tue Mar 2 08:22:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Mar 2010 08:22:42 -0800 Subject: Comment amtetcher SNF 2010-03-02 08:22:42: Turbo purge info Message-ID: The higher turbo purge (12cc instead of 10 cc) will not effect the process. Its main purpose is to protect the turbo's bearings from etch byproducts. If the MFC drift gets worse, I will order a new MFC to replace the purge MFC. From mmessana at snf.stanford.edu Wed Mar 3 14:34:26 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Wed, 3 Mar 2010 14:34:26 -0800 Subject: Problem amtetcher SNF 2010-03-03 14:34:25: Wafer Clip Broken Message-ID: Second tray, bottom wafer position... one of the four clips is broken. From mdickey at snf.stanford.edu Thu Mar 4 07:25:25 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 4 Mar 2010 07:25:25 -0800 Subject: Problem amtetcher SNF 2010-03-03 14:34:25: Wafer Clip Broken Message-ID: clip replaced From zzp at snf.stanford.edu Tue Mar 9 18:16:35 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 9 Mar 2010 18:16:35 -0800 Subject: Problem amtetcher SNF 2010-03-09 18:16:33: RF Generator Went Off Message-ID: First run fine, all subsequent three runs failed at this error of RF Generator Went Off. From zzp at snf.stanford.edu Tue Mar 9 18:31:49 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 9 Mar 2010 18:31:49 -0800 Subject: Shutdown amtetcher SNF 2010-03-09 18:31:49: RF Generator Went Off Message-ID: Even no RF generated at Program 2 From eenriquez at snf.stanford.edu Wed Mar 10 16:25:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 16:25:44 -0800 Subject: Shutdown amtetcher SNF 2010-03-09 18:31:49: RF Generator Went Off Message-ID: Matching network burned up. Repaired and installed the spare matching network. Ran recipe 3 and 2 with no problems. From eenriquez at snf.stanford.edu Wed Mar 10 16:27:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 16:27:37 -0800 Subject: Problem amtetcher SNF 2010-03-09 18:16:33: RF Generator Went Off Message-ID: Matching network burned up. Repaired and installed the spare matching network. Ran recipe 3 and 2 with no problems. From eenriquez at snf.stanford.edu Wed Mar 10 19:38:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 19:38:04 -0800 Subject: Comment amtetcher SNF 2010-02-26 10:04:47: Turbo purge update Message-ID: Archived From king at snf.stanford.edu Thu Mar 11 01:25:19 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 11 Mar 2010 01:25:19 -0800 Subject: Comment amtetcher SNF 2010-03-11 01:25:19: Spastic loader Message-ID: The loader has been going wild for the past couple of months. From eenriquez at snf.stanford.edu Thu Mar 11 13:25:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Mar 2010 13:25:12 -0800 Subject: Comment amtetcher SNF 2010-03-11 01:25:19: Spastic loader Message-ID: No problem found. Cycled the loader many times without seeing any spastic behavior. Need to make sure the loader is all the way up or all the way down before releasing either loader button.