Comment amtetcher SNF 2010-02-18 10:34:32: found a broken wafer (dummy) on the bench
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Mar 2 08:08:58 PST 2010
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Comment amtetcher SNF 2010-02-18 15:19:07: Turbo purge high error
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Comment amtetcher SNF 2010-02-18 16:02:56: Dummies loaded incorrectly and tool not on standby program by previous user
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Comment amtetcher SNF 2010-02-18 15:19:07: Turbo purge high error
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