Comment amtetcher SNF 2010-03-02 08:22:42: Turbo purge info

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 2 08:22:42 PST 2010


The higher turbo purge (12cc  instead of 10 cc) will not effect the process.  Its main purpose is to  protect the turbo's bearings from etch byproducts.  If the MFC drift gets worse, I will order a new MFC to replace the purge MFC.




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