From latta at snf.stanford.edu Wed Nov 3 17:40:18 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Nov 2010 17:40:18 -0700 Subject: Comment amtetcher SNF 2010-11-03 17:40:17: Another Prog 4 check Message-ID: Performed after hex base and chamber floor cleaned. A tiny 'object' was found between the base and hex assembly.... Prog #4 for 5 mins. Results; Si etch = 871A (174A/min) PR ER = 258A/min These are very similar results to those of 10/28/10. Use at your own risk. From cachang at snf.stanford.edu Thu Nov 4 16:45:49 2010 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Thu, 4 Nov 2010 16:45:49 -0700 Subject: Shutdown amtetcher SNF 2010-11-04 16:45:49: Turbo went off Message-ID: Want to do seasoning, but it says NOT READY and Turbo went off. From mdickey at snf.stanford.edu Fri Nov 5 07:30:08 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 5 Nov 2010 07:30:08 -0700 Subject: Shutdown amtetcher SNF 2010-11-04 16:45:49: Turbo went off Message-ID: When I got to the system the turbo was running. I ran recipe 2 with no problems. Not sure as to why the turbo went off. From latta at snf.stanford.edu Tue Nov 9 14:19:19 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 9 Nov 2010 14:19:19 -0800 Subject: Comment amtetcher SNF 2010-11-09 14:19:19: Yet another Prog 4 check Message-ID: After gas calibration factor changed; Prog #4 for 5 mins. Results; Si etch = 883A (177A/min) PR ER = 133A/min These are very similar results to those of 11/03/10. Use at your own risk. From cursive at snf.stanford.edu Tue Nov 9 21:51:11 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 9 Nov 2010 21:51:11 -0800 Subject: Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min Message-ID: run #4 5min, poly si etch rate=133A/min From latta at snf.stanford.edu Wed Nov 10 16:16:06 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 10 Nov 2010 16:16:06 -0800 Subject: Comment amtetcher SNF 2010-11-10 16:16:05: Prog#4 with increased CM pressure Message-ID: Ran the program for 5 mins at 50mT (instead of 49mT) Results; Si etch = 749A (150A/min) PR ER = 152A/min Slightly worse than 11/09/10 From jcdoll at snf.stanford.edu Sun Nov 14 13:33:53 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 14 Nov 2010 13:33:53 -0800 Subject: Problem amtetcher SNF 2010-11-14 13:33:52: missing clip Message-ID: tray 3, bottom wafer slot is missing a clip From yiwu at snf.stanford.edu Sun Nov 14 16:35:13 2010 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 14 Nov 2010 16:35:13 -0800 Subject: Problem amtetcher SNF 2010-11-14 16:35:13: cyro/chamber leak Message-ID: Processing stoped during pumping down due to cyro/chamber leak alarm. From mdickey at snf.stanford.edu Mon Nov 15 07:00:29 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 15 Nov 2010 07:00:29 -0800 Subject: Problem amtetcher SNF 2010-11-14 13:33:52: missing clip Message-ID: clip replaced From eenriquez at snf.stanford.edu Tue Nov 16 08:45:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Nov 2010 08:45:26 -0800 Subject: Problem amtetcher SNF 2010-11-14 16:35:13: cyro/chamber leak Message-ID: No problem found. Possibly a recipe problem. If the cryo pump recipe parameter is set to Yes, this error would occur. From cachang at snf.stanford.edu Fri Nov 19 20:22:56 2010 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 19 Nov 2010 20:22:56 -0800 Subject: Problem amtetcher SNF 2010-11-19 20:22:55: Vaccum wand tip is broken Message-ID: From minchieh at snf.stanford.edu Sun Nov 21 09:11:30 2010 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Sun, 21 Nov 2010 09:11:30 -0800 Subject: Problem amtetcher SNF 2010-11-21 09:11:30: clamp broken Message-ID: one of the 4 wafer clamps on Tray 5, 2nd position was broken. From mdickey at snf.stanford.edu Mon Nov 22 06:44:59 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:44:59 -0800 Subject: Problem amtetcher SNF 2010-11-19 20:22:55: Vaccum wand tip is broken Message-ID: tip replaced From mdickey at snf.stanford.edu Mon Nov 22 06:50:02 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:50:02 -0800 Subject: Problem amtetcher SNF 2010-11-21 09:11:30: clamp broken Message-ID: 2 clips replaced From eenriquez at snf.stanford.edu Mon Nov 22 13:36:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Nov 2010 13:36:31 -0800 Subject: Comment amtetcher SNF 2010-11-22 13:36:31: Update low etch rate Message-ID: Jim McVitte checked the bias voltage readout . The indicated value is about 2% of the actual voltage. From jwpchen at snf.stanford.edu Tue Nov 23 09:22:26 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 23 Nov 2010 09:22:26 -0800 Subject: Shutdown amtetcher SNF 2010-11-23 09:22:26: lost system power Message-ID: when starting to lift bell jar, system appears to have lost power and all screens are now blank From eenriquez at snf.stanford.edu Tue Nov 23 11:51:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2010 11:51:48 -0800 Subject: Shutdown amtetcher SNF 2010-11-23 09:22:26: lost system power Message-ID: Restored power and re-entered system constants and afc parameters. From eenriquez at snf.stanford.edu Tue Nov 23 11:52:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2010 11:52:56 -0800 Subject: Shutdown amtetcher SNF 2010-11-23 11:52:56: Bell jar hoist is defective Message-ID: The hoist drive has disengaged from the motor. From eenriquez at snf.stanford.edu Tue Nov 23 14:42:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2010 14:42:09 -0800 Subject: Comment amtetcher SNF 2010-11-23 14:42:07: Update bell jar hoist Message-ID: The hoist has been removed from the system and repaired. Need to reinstall and test. Will also need to reenter all recipes, system constants and MFC paramters. The system should be ready by 3 PM tomorrow. From eenriquez at snf.stanford.edu Wed Nov 24 17:24:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Nov 2010 17:24:01 -0800 Subject: Shutdown amtetcher SNF 2010-11-23 11:52:56: Bell jar hoist is defective Message-ID: Repaired the hoist and adjusted the stop switches and brake. Also , reentered the system constants and mfc parameters. Nancy is now entering all the recipes. From eenriquez at snf.stanford.edu Wed Nov 24 17:24:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Nov 2010 17:24:10 -0800 Subject: Comment amtetcher SNF 2010-11-23 14:42:07: Update bell jar hoist Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 24 17:26:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Nov 2010 17:26:06 -0800 Subject: Problem amtetcher SNF 2010-11-24 17:26:05: Need to reprogram recipes Message-ID: Need recipes and qual From latta at snf.stanford.edu Wed Nov 24 17:26:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 24 Nov 2010 17:26:33 -0800 Subject: Comment amtetcher SNF 2010-11-24 17:26:32: High hexode temp error Message-ID: during Prog #2. Hex resd 29C, but is going down. From latta at snf.stanford.edu Wed Nov 24 17:28:20 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 24 Nov 2010 17:28:20 -0800 Subject: Problem amtetcher SNF 2010-11-24 17:26:05: Need to reprogram recipes Message-ID: Std programs in memory. Prog #2 run.