Comment amtetcher SNF 2010-11-03 17:40:17: Another Prog 4 check

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Nov 3 17:40:18 PDT 2010


Performed after hex base and chamber floor cleaned.  A tiny 'object' was found between the base and hex assembly....
 Prog #4 for 5 mins.  Results;
Si etch = 871A (174A/min)
PR ER = 258A/min
These are very similar results to those of 10/28/10.
Use at your own risk.




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