Comment amtetcher SNF 2010-11-09 14:19:19: Yet another Prog 4 check

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Nov 9 14:19:19 PST 2010


After gas calibration factor changed;
Prog #4 for 5 mins.  Results;
Si etch = 883A (177A/min)
PR ER = 133A/min
These are very similar results to those of 11/03/10.
Use at your own risk.




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