Comment amtetcher SNF 2010-11-10 16:16:05: Prog#4 with increased CM pressure

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Nov 10 16:16:06 PST 2010

Previous message: Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min
Next message: Problem amtetcher SNF 2010-11-14 13:33:52: missing clip
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran the program for 5 mins at 50mT (instead of 49mT) Results;
Si etch = 749A (150A/min)
PR ER = 152A/min
Slightly worse than 11/09/10

Previous message: Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min
Next message: Problem amtetcher SNF 2010-11-14 13:33:52: missing clip
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the amtetcher-pcs mailing list