From latta at snf.stanford.edu Fri Oct 8 11:25:53 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 Oct 2010 11:25:53 -0700 Subject: Problem amtetcher SNF 2010-09-30 16:39:28: Gate 5 won't close Message-ID: duplicate problem message. See update of 8/5 From yeh at snf.stanford.edu Mon Oct 11 11:33:28 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 11 Oct 2010 11:33:28 -0700 Subject: Comment amtetcher SNF 2010-10-11 11:33:28: si etch rate is off Message-ID: etched asml alignment marks into poly. the etch rate is much slower than past runs and also not consistent from session to session and not uniform within a wafer. etch data- target: 1200A etch into poly program 4 previous run as reference: 5min -> ~1200A +/- <100A 10/8 test etch #1: 5min -> 700A-770A (much slower etch rate) 10/8 test etch #2: 7.8min -> 1224-1296A (fairy consistent with etch #1 rate) 10/8 actual etch: 7.8min etch wafer 1: 1398 - 1748A (non-uniform and inconsistent with test etch #2) wafer 2: 2000 - 3800A (inconsistent with wafer 1 and test etch #2 and very non-uniform) From eenriquez at snf.stanford.edu Mon Oct 11 12:29:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Oct 2010 12:29:37 -0700 Subject: Problem amtetcher SNF 2010-09-11 01:10:59: Pump program Gate 5 won't close Message-ID: Replaced gas 5 shutoff valve. From eenriquez at snf.stanford.edu Mon Oct 11 12:31:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Oct 2010 12:31:53 -0700 Subject: Comment amtetcher SNF 2010-08-05 11:58:30: Update Message-ID: Archived. Replaced leaky valve From eenriquez at snf.stanford.edu Mon Oct 11 12:37:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Oct 2010 12:37:03 -0700 Subject: Comment amtetcher SNF 2010-10-11 12:37:03: Completed monthly PM Message-ID: Replaced gas 5 nupro valve, chiller cold water inlet valve and 2 ardel insulator plates (tray 5 and 6). From wslee at snf.stanford.edu Tue Oct 12 11:35:30 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 12 Oct 2010 11:35:30 -0700 Subject: Problem amtetcher SNF 2010-10-12 11:35:30: unstable bias Message-ID: A few runs (including seasoning), the bias hit -530 V for recipe 3. However, for 2 runs, the plasma flashed on and off and the bias bounced around from -100V to -150V. From latta at snf.stanford.edu Tue Oct 12 13:08:23 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 12 Oct 2010 13:08:23 -0700 Subject: Shutdown amtetcher SNF 2010-10-12 13:08:22: Badly arced. Message-ID: Tray 5 badly arced. Trays 4 and 6 may need parts replaced too. From latta at snf.stanford.edu Tue Oct 12 13:08:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 12 Oct 2010 13:08:45 -0700 Subject: Problem amtetcher SNF 2010-10-12 11:35:30: unstable bias Message-ID: Tray 5 badly arced. From mdickey at snf.stanford.edu Tue Oct 12 14:18:59 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 12 Oct 2010 14:18:59 -0700 Subject: Comment amtetcher SNF 2010-10-12 14:18:58: trays Message-ID: replaced burnt parts....Nancy will test From latta at snf.stanford.edu Tue Oct 12 15:39:01 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 12 Oct 2010 15:39:01 -0700 Subject: Shutdown amtetcher SNF 2010-10-12 13:08:22: Badly arced. Message-ID: Mike replaced burnt tray parts. Two stand-by recipes and a Prog 4 (5 mins) were run without any arcing observed. From latta at snf.stanford.edu Tue Oct 12 15:39:21 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 12 Oct 2010 15:39:21 -0700 Subject: Comment amtetcher SNF 2010-10-12 14:18:58: trays Message-ID: Tested- looks fine. From mtang at snf.stanford.edu Mon Oct 18 11:44:41 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:44:41 -0700 Subject: Problem amtetcher SNF 2010-10-18 11:44:41: Please monitor your etch rates! Message-ID: A user reported (not on Coral, darn it) unusually low oxide etch rates for etch done Thursday. Cesar checked the system this morning and found that the gas tubes were off-alignment. He aligned them. The system is reserved for etch rate checks tomorrow. In the meantime, please be aware that the etch rates may have changed - you may want to monitor your process accordingly or postpone your critical etch until the system has been checked. Today's users: please report your results (karthikv?) From karthikv at snf.stanford.edu Mon Oct 18 15:34:14 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Mon, 18 Oct 2010 15:34:14 -0700 Subject: Comment amtetcher SNF 2010-10-18 15:34:13: LTO etch rate Message-ID: LTO deposited using LTO400PC etched at a rate of approximately 270 A/min From npapte at snf.stanford.edu Mon Oct 18 15:49:38 2010 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Mon, 18 Oct 2010 15:49:38 -0700 Subject: Comment amtetcher SNF 2010-10-18 15:49:38: process #4 etch rate Message-ID: etched 2 wafers using process #4 on 2010/10/10 for 6*20 min cycles, for an etch depth of 1.6 um (~133 A/min), SPR 220-7 consumed was 3 um (~250 A/min) From eenriquez at snf.stanford.edu Tue Oct 19 10:16:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Oct 2010 10:16:57 -0700 Subject: Comment amtetcher SNF 2010-10-19 10:16:57: Update low etch rate Message-ID: Found the hot loop temperature too low. Now troubleshooting From eenriquez at snf.stanford.edu Tue Oct 19 14:36:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Oct 2010 14:36:00 -0700 Subject: Comment amtetcher SNF 2010-10-19 14:35:59: Update low etch rate Message-ID: Hot loop heater is not functioning. Order new heater. It should be here by 10/22. From jcdoll at snf.stanford.edu Tue Oct 19 19:08:32 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Tue, 19 Oct 2010 19:08:32 -0700 Subject: Problem amtetcher SNF 2010-10-19 19:08:31: asml marks come out shallow Message-ID: echo user "yeh" on the slow si etch rate and nonuniformity. i ran program #4 for 5 minutes (after 20 minute season) and etched the marks into a layer of polysilicon. wafer #1: 98-105nm range (n=4 measurements) wafer #2: 89-92nm range (n=2) spec etch rate is 240A/min for poly. measured varies from 180-210 A/min with ~5% variation on a single wafer and 10% wafer to wafer. this agrees with substantial WQ% variation i've been seeing between wafers and for marks on a single wafer (e.g. 40-80% range on a single wafer). something for asml users to be aware of. From latta at snf.stanford.edu Fri Oct 22 10:54:16 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Oct 2010 10:54:16 -0700 Subject: Comment amtetcher SNF 2010-10-19 14:35:59: Update low etch rate Message-ID: new heater installed- but not getting above 28C. From latta at snf.stanford.edu Fri Oct 22 10:55:23 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Oct 2010 10:55:23 -0700 Subject: Problem amtetcher SNF 2010-10-22 10:55:23: New heater installed Message-ID: However, hot loop is not getting above 28C. Spec is 35C. From ericp at snf.stanford.edu Sat Oct 23 19:49:00 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 23 Oct 2010 19:49:00 -0700 Subject: Problem amtetcher SNF 2010-10-23 19:48:59: hoist sounds terrible Message-ID: The bell jar hoist makes a loud bang on lifting, and generally sounds louder than normal throughout the travel. From eenriquez at snf.stanford.edu Mon Oct 25 12:07:59 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Oct 2010 12:07:59 -0700 Subject: Problem amtetcher SNF 2010-10-23 19:48:59: hoist sounds terrible Message-ID: Lubricated the hoist shaft and cycled the hoist up and down. From latta at snf.stanford.edu Wed Oct 27 14:55:22 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Oct 2010 14:55:22 -0700 Subject: Comment amtetcher SNF 2010-10-27 14:55:21: dummies replaced with new wafers Message-ID: From latta at snf.stanford.edu Wed Oct 27 14:55:51 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Oct 2010 14:55:51 -0700 Subject: Problem amtetcher SNF 2010-10-27 14:55:50: clip broken, tray5 position 1 Message-ID: From mdickey at snf.stanford.edu Thu Oct 28 06:46:51 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 28 Oct 2010 06:46:51 -0700 Subject: Problem amtetcher SNF 2010-10-27 14:55:50: clip broken, tray5 position 1 Message-ID: clip replaced From eenriquez at snf.stanford.edu Thu Oct 28 12:08:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Oct 2010 12:08:39 -0700 Subject: Comment amtetcher SNF 2010-10-28 12:08:38: Update hot loop temperature Message-ID: Replaced hot loop water pump. Water pressure increased from 10 psi to about 65 psi. From latta at snf.stanford.edu Thu Oct 28 14:00:48 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 28 Oct 2010 14:00:48 -0700 Subject: Problem amtetcher SNF 2010-10-22 10:55:23: New heater installed Message-ID: new pump installed and hot loop is at 32C. From latta at snf.stanford.edu Thu Oct 28 14:01:37 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 28 Oct 2010 14:01:37 -0700 Subject: Comment amtetcher SNF 2010-10-11 12:37:03: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Thu Oct 28 14:18:40 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 28 Oct 2010 14:18:40 -0700 Subject: Problem amtetcher SNF 2010-10-28 14:18:40: Quick Etch Rate check for Prog #4 Message-ID: After the heater and pump for the hot loop have been replaced a qual was run using Prog #4 for 5 mins. Results; Si etch = 887A (177A/min) PR ER = 275A/min These are very similar results to those of 10/12/10. The problem has not been fix; more troubleshooting to follow. Use at your own risk.