Problem amtetcher SNF 2010-10-28 14:18:40: Quick Etch Rate check for Prog #4

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Oct 28 14:18:40 PDT 2010


After the heater and pump for the hot loop have been replaced a qual was run using Prog #4 for 5 mins.  Results;
Si etch = 887A (177A/min)
PR ER = 275A/min
These are very similar results to those of 10/12/10.
The problem has not been fix; more troubleshooting to follow.
Use at your own risk.




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