From dwnam at snf.stanford.edu Wed Sep 1 09:54:28 2010 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 1 Sep 2010 09:54:28 -0700 Subject: Problem amtetcher SNF 2010-09-01 09:54:28: Twezzer broken Message-ID: Vacuum twezzer is broken. From mdickey at snf.stanford.edu Wed Sep 1 13:02:46 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2010 13:02:46 -0700 Subject: Problem amtetcher SNF 2010-09-01 09:54:28: Twezzer broken Message-ID: wnd tip replaced From king at snf.stanford.edu Fri Sep 10 22:34:31 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Sep 2010 22:34:31 -0700 Subject: Problem amtetcher SNF 2010-09-10 22:34:31: AMT is missing a pin tab Message-ID: It's missing a tab on the top position of the first column. I ran a dummy wafer in that position. From zeyuan at snf.stanford.edu Sat Sep 11 01:09:56 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sat, 11 Sep 2010 01:09:56 -0700 Subject: Problem amtetcher SNF 2010-09-11 01:09:55: Message-ID: From zeyuan at snf.stanford.edu Sat Sep 11 01:11:00 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sat, 11 Sep 2010 01:11:00 -0700 Subject: Problem amtetcher SNF 2010-09-11 01:10:59: Pump program Gate 5 won't close Message-ID: It was like this when I started using the tool, and when I left the tool running program2. From mdickey at snf.stanford.edu Mon Sep 13 06:42:13 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:42:13 -0700 Subject: Problem amtetcher SNF 2010-09-10 22:34:31: AMT is missing a pin tab Message-ID: clip replaced From eenriquez at snf.stanford.edu Mon Sep 13 14:00:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Sep 2010 14:00:26 -0700 Subject: Problem amtetcher SNF 2010-09-11 01:09:55: Message-ID: From eenriquez at snf.stanford.edu Tue Sep 21 07:45:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:45:56 -0700 Subject: Comment amtetcher SNF 2010-08-30 07:58:46: Update window dirty Message-ID: Window has been replaced From eenriquez at snf.stanford.edu Tue Sep 21 07:46:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:46:08 -0700 Subject: Comment amtetcher SNF 2010-08-26 00:05:57: Window needs cleaning Message-ID: Window has been replaced From eenriquez at snf.stanford.edu Tue Sep 21 07:46:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:46:22 -0700 Subject: Comment amtetcher SNF 2010-08-19 07:55:48: tray clips Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 21 07:46:34 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:46:34 -0700 Subject: Comment amtetcher SNF 2010-08-20 15:06:44: Dummies changed Message-ID: Archived From jsegal at snf.stanford.edu Wed Sep 29 10:12:20 2010 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Wed, 29 Sep 2010 10:12:20 -0700 Subject: Problem amtetcher SNF 2010-09-29 10:12:20: latch broken Message-ID: One of the latches on the top wafer slot of the 3rd panel is broken From mdickey at snf.stanford.edu Wed Sep 29 10:56:55 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Sep 2010 10:56:55 -0700 Subject: Problem amtetcher SNF 2010-09-29 10:12:20: latch broken Message-ID: clip replaced From eenriquez at snf.stanford.edu Thu Sep 30 08:01:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Sep 2010 08:01:53 -0700 Subject: Comment amtetcher SNF 2010-08-31 21:34:33: Check programs before use Message-ID: Archived From takashifuse at snf.stanford.edu Thu Sep 30 16:39:28 2010 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Thu, 30 Sep 2010 16:39:28 -0700 Subject: Problem amtetcher SNF 2010-09-30 16:39:28: Gate 5 won't close Message-ID: During pumping program, 'Gete 5 won't close' alarm happend. I stop alarm and run again, but alarm not disappear.