From eenriquez at snf.stanford.edu Tue Apr 5 10:42:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Apr 2011 10:42:53 -0700 Subject: Comment amtetcher SNF 2011-03-11 08:14:41: oil change Message-ID: Archived From cursive at snf.stanford.edu Wed Apr 6 18:49:22 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 6 Apr 2011 18:49:22 -0700 Subject: Problem amtetcher SNF 2011-04-06 18:49:21: arching when running #4 Message-ID: From mdickey at snf.stanford.edu Thu Apr 7 06:55:23 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 7 Apr 2011 06:55:23 -0700 Subject: Problem amtetcher SNF 2011-04-06 18:49:21: arching when running #4 Message-ID: no physical signs of any arcing on the trays From grahamab at snf.stanford.edu Sat Apr 9 16:50:18 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 9 Apr 2011 16:50:18 -0700 Subject: Problem amtetcher SNF 2011-04-09 16:50:17: wand broken and pneumatics finicky Message-ID: the wand is missing the entire quartz piece. also, the pneumatics that actuate the tray holder seem a little off. had to jiggle the part that comes down a few times in order for it to work on almost every time coming down (goes back up without issue). you can hear a very light, but still audible hiss when you've jiggled it enough to work. From cbaxter at snf.stanford.edu Sun Apr 10 18:03:54 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 10 Apr 2011 18:03:54 -0700 Subject: Problem amtetcher SNF 2011-04-09 16:50:17: wand broken and pneumatics finicky Message-ID: Changed vacuum wand and adjusted clamp.. From dongl at snf.stanford.edu Tue Apr 12 22:15:34 2011 From: dongl at snf.stanford.edu (dongl at snf.stanford.edu) Date: Tue, 12 Apr 2011 22:15:34 -0700 Subject: Shutdown amtetcher SNF 2011-04-12 22:15:33: arcing/burning was seen Message-ID: There was blinking and arcing during etching and I aborted the process. A possible reason is that the tray was not firmly mounted. During unloading, black burning residues were found at the up right corners of both the tray and the latch . I cleaned the burning residue with wipes and there is still some residue left. The machine is now under process 2 and it seems ok. However, I think an inspection by staff is needed before any further operation. I appologize for the inconvenience. From dongl at snf.stanford.edu Tue Apr 12 22:19:54 2011 From: dongl at snf.stanford.edu (dongl at snf.stanford.edu) Date: Tue, 12 Apr 2011 22:19:54 -0700 Subject: Problem amtetcher SNF 2011-04-12 22:19:53: arcing/burning was seen Message-ID: There was blinking and arcing during etching and I aborted the process. A possible reason is that the tray was not firmly mounted. During unloading, black burning residues were found at the up right corners of both the tray and the latch . I cleaned the burning residue with wipes and there is still some residue left. The machine is now under process 2 and it seems ok. However, I think an inspection by staff is needed before any further operation. I appologize for the inconvenience. From eenriquez at snf.stanford.edu Wed Apr 13 10:47:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Apr 2011 10:47:23 -0700 Subject: Shutdown amtetcher SNF 2011-04-12 22:15:33: arcing/burning was seen Message-ID: Replaced burnt out insulators and cleaned trays. From eenriquez at snf.stanford.edu Wed Apr 13 10:47:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Apr 2011 10:47:28 -0700 Subject: Problem amtetcher SNF 2011-04-12 22:19:53: arcing/burning was seen Message-ID: Replaced burnt out insulators and cleaned trays. From grahamab at snf.stanford.edu Thu Apr 14 00:07:03 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 14 Apr 2011 00:07:03 -0700 Subject: Comment amtetcher SNF 2011-04-14 00:07:02: found a clip on the floor Message-ID: found one of the clips on the floor near the tool. I set it on the shelf near the vacuum wand. From eenriquez at snf.stanford.edu Thu Apr 14 07:25:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Apr 2011 07:25:06 -0700 Subject: Comment amtetcher SNF 2011-04-14 00:07:02: found a clip on the floor Message-ID: Thanks. I replaced several clips. It must be one of the used ones. From sclaussen at snf.stanford.edu Thu Apr 14 07:55:14 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 14 Apr 2011 07:55:14 -0700 Subject: Comment amtetcher SNF 2011-04-14 07:55:14: previous user didn't run pump program Message-ID: Machine showed message "End of program. Hexode 28 deg C+" when I arrived. From mislam at snf.stanford.edu Mon Apr 18 01:56:06 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 18 Apr 2011 01:56:06 -0700 Subject: Shutdown amtetcher SNF 2011-04-18 01:56:06: Bell Jar won't move Message-ID: End of my run the Bell Jar won't go up. I have 3 wafers stuck in the chamber. 1 wafer in tray #1, 2 wafers in tray #2. Please save my wafer in the wafer box at the unload station. Tkx. From eenriquez at snf.stanford.edu Mon Apr 18 10:53:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Apr 2011 10:53:40 -0700 Subject: Shutdown amtetcher SNF 2011-04-18 01:56:06: Bell Jar won't move Message-ID: The belljar disengaged from the drive mechanism. Re-engaged and adjusted the brake. Cycled many times without any problems. From dongl at snf.stanford.edu Tue Apr 19 19:43:34 2011 From: dongl at snf.stanford.edu (dongl at snf.stanford.edu) Date: Tue, 19 Apr 2011 19:43:34 -0700 Subject: Problem amtetcher SNF 2011-04-19 19:43:33: Chamber stuck half way up Message-ID: The control panel is frozen now. None of the buttons reponds. It happened during unloading and there was no wrong operations. Jim said that I can just report the problem but not shut it down because someone smarter than us may fix it. From eenriquez at snf.stanford.edu Wed Apr 20 11:28:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Apr 2011 11:28:17 -0700 Subject: Problem amtetcher SNF 2011-04-19 19:43:33: Chamber stuck half way up Message-ID: Reset the controller and adjusted the chamber lift brakes From rik at snf.stanford.edu Wed Apr 27 23:08:43 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 27 Apr 2011 23:08:43 -0700 Subject: Problem amtetcher SNF 2011-04-27 23:08:42: "Flow 2 Out Limit" error Message-ID: Was running Prog 3 for 20 mins. With 2 mins left in the etch, it halted and gave the above message. From eenriquez at snf.stanford.edu Thu Apr 28 09:10:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Apr 2011 09:10:59 -0700 Subject: Problem amtetcher SNF 2011-04-27 23:08:42: "Flow 2 Out Limit" error Message-ID: Adjusted cylinder pressure.