Shutdown amtetcher SNF 2011-04-18 01:56:06: Bell Jar won't move

[mislam at snf.stanford.edu]

End of my run the Bell Jar won't go up. I have 3 wafers stuck in the chamber. 1 wafer in tray #1, 2 wafers in tray #2. Please save my wafer in the wafer box  at the unload station. Tkx.