From cbaxter at snf.stanford.edu Wed Aug 3 10:42:16 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Aug 2011 10:42:16 -0700 Subject: Problem amtetcher SNF 2011-07-30 08:18:51: LOADER does not work. Message-ID: Adjusted the pnumatic plunger. From cbaxter at snf.stanford.edu Wed Aug 3 10:42:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Aug 2011 10:42:21 -0700 Subject: Problem amtetcher SNF 2011-07-31 17:55:02: loader does not work Message-ID: From latta at snf.stanford.edu Fri Aug 5 11:51:48 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 Aug 2011 11:51:48 -0700 Subject: Comment amtetcher SNF 2011-08-05 11:51:48: polymer is building up Message-ID: in the chmber and some hunks have fallen onto the chamber floor. From mdickey at snf.stanford.edu Fri Aug 5 13:17:22 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 5 Aug 2011 13:17:22 -0700 Subject: Comment amtetcher SNF 2011-08-05 13:17:21: flakes Message-ID: wiped down the base plate From latta at snf.stanford.edu Fri Aug 5 16:44:21 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 Aug 2011 16:44:21 -0700 Subject: Comment amtetcher SNF 2011-08-05 16:44:20: ASML target program tested (Prog #4) Message-ID: Prog #4 00:05:00 Average depth = 919A Si Etch Rate = 184A/min PR Etch Rate = 268A/min Time for 1200A etch = 00:06:31 From latta at snf.stanford.edu Fri Aug 5 16:44:36 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 Aug 2011 16:44:36 -0700 Subject: Comment amtetcher SNF 2011-07-07 15:45:01: Ran ASML target recipe- ER still low Message-ID: new test posted From latta at snf.stanford.edu Fri Aug 5 16:48:04 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 Aug 2011 16:48:04 -0700 Subject: Comment amtetcher SNF 2011-08-05 16:48:04: Oxide Etch Program tested (prog #3) Message-ID: Thermal Ox Etch Rate = 389A/min Nitride2 ER = 253A/min Si ER = 30A/min From latta at snf.stanford.edu Fri Aug 5 16:49:04 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 Aug 2011 16:49:04 -0700 Subject: Comment amtetcher SNF 2011-08-05 16:49:03: Resist burnt Message-ID: I ran prog #3 for 10 mins and the resist was burned. Possible cooling issue? From fpurkl at snf.stanford.edu Wed Aug 10 12:09:55 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Wed, 10 Aug 2011 12:09:55 -0700 Subject: Problem amtetcher SNF 2011-08-10 12:09:54: 1 wafer holder broken Message-ID: On the 4th panel, on the 3rd wafer from the top one of the pins holding the wafer seems to be broken. The wafer snaps out of the pin when mounting the panel. From mdickey at snf.stanford.edu Wed Aug 10 12:49:03 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 10 Aug 2011 12:49:03 -0700 Subject: Problem amtetcher SNF 2011-08-10 12:09:54: 1 wafer holder broken Message-ID: replaced broken clip From eenriquez at snf.stanford.edu Mon Aug 15 10:27:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 10:27:51 -0700 Subject: Comment amtetcher SNF 2011-08-05 13:17:21: flakes Message-ID: Archived From eenriquez at snf.stanford.edu Mon Aug 15 10:28:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 10:28:22 -0700 Subject: Comment amtetcher SNF 2011-08-05 11:51:48: polymer is building up Message-ID: Archived From eenriquez at snf.stanford.edu Mon Aug 15 10:29:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 10:29:28 -0700 Subject: Comment amtetcher SNF 2011-08-15 10:29:27: Completed monthly PM Message-ID: Cleaned the baseplate and view port. Leak rate = 0 mT/min. From chienyuc at snf.stanford.edu Tue Aug 23 15:02:26 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 23 Aug 2011 15:02:26 -0700 Subject: Problem amtetcher SNF 2011-08-23 15:02:25: turbo went off Message-ID: Found "NOT READY" after evacuation. Need to restart turbo pump. Left vented. From latta at snf.stanford.edu Tue Aug 23 15:39:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 Aug 2011 15:39:19 -0700 Subject: Problem amtetcher SNF 2011-08-23 15:02:25: turbo went off Message-ID: Elmer started the turbo. System is presently running the stand by program, #2.