From eenriquez at snf.stanford.edu Wed Dec 7 07:37:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Dec 2011 07:37:09 -0800 Subject: Comment amtetcher SNF 2011-11-28 18:54:08: flaking Message-ID: Wet cleaned the chamber From latta at snf.stanford.edu Wed Dec 7 14:48:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:48:57 -0800 Subject: Comment amtetcher SNF 2011-09-28 14:11:19: Replaced dummy wafers. Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:49:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:49:19 -0800 Subject: Comment amtetcher SNF 2011-02-10 20:08:59: #4 Si etch rate check Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:49:34 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:49:34 -0800 Subject: Comment amtetcher SNF 2011-03-14 11:01:18: Completed monthly PM. Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:50:30 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:50:30 -0800 Subject: Comment amtetcher SNF 2011-02-10 18:42:05: #3 PR etch rate Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:51:50 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:51:50 -0800 Subject: Comment amtetcher SNF 2011-02-10 10:04:21: Etch rate check- Prog #4, 5 mins Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:52:34 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:52:34 -0800 Subject: Comment amtetcher SNF 2010-10-11 11:33:28: si etch rate is off Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:52:46 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:52:46 -0800 Subject: Comment amtetcher SNF 2010-10-18 15:34:13: LTO etch rate Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:52:58 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:52:58 -0800 Subject: Comment amtetcher SNF 2010-10-18 15:49:38: process #4 etch rate Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:53:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:53:15 -0800 Subject: Comment amtetcher SNF 2010-11-03 17:40:17: Another Prog 4 check Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:53:24 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:53:24 -0800 Subject: Comment amtetcher SNF 2010-11-09 14:19:19: Yet another Prog 4 check Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:53:34 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:53:34 -0800 Subject: Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:53:44 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:53:44 -0800 Subject: Comment amtetcher SNF 2010-11-10 16:16:05: Prog#4 with increased CM pressure Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:54:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:54:03 -0800 Subject: Comment amtetcher SNF 2011-01-18 17:17:42: #4 Si etch rate ~210A/min Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:54:13 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:54:13 -0800 Subject: Comment amtetcher SNF 2011-01-20 21:59:35: Quals part 1 Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:54:24 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:54:24 -0800 Subject: Comment amtetcher SNF 2011-01-28 17:00:57: Jan 2011 quals (ERs and Selectivities) Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:54:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:54:35 -0800 Subject: Comment amtetcher SNF 2011-02-04 11:42:30: SI #4 to low Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:54:46 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:54:46 -0800 Subject: Comment amtetcher SNF 2011-02-06 10:20:05: #4 Si etch rate Message-ID: archived From sclaussen at snf.stanford.edu Sat Dec 10 15:52:09 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sat, 10 Dec 2011 15:52:09 -0800 Subject: Problem amtetcher SNF 2011-12-10 15:52:08: Turbo went off Message-ID: Was taking a LONG time for cooling hex (~10 minutes) at the start of the program. I aborted it, and started the program again, and after a few minutes of "Cooling hex," got the message "No cooling water," then "Turbo went off." From sclaussen at snf.stanford.edu Sat Dec 10 15:58:34 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sat, 10 Dec 2011 15:58:34 -0800 Subject: Shutdown amtetcher SNF 2011-12-10 15:58:33: Turbo went off Message-ID: From cbaxter at snf.stanford.edu Sun Dec 11 11:57:49 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Dec 2011 11:57:49 -0800 Subject: Shutdown amtetcher SNF 2011-12-11 11:57:49: Hot loop pump Message-ID: The hot loop pump is bad (motor is seized). From eenriquez at snf.stanford.edu Mon Dec 12 09:26:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:26:18 -0800 Subject: Problem amtetcher SNF 2011-12-10 15:52:08: Turbo went off Message-ID: Cooling water is restored. From eenriquez at snf.stanford.edu Mon Dec 12 09:26:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:26:42 -0800 Subject: Shutdown amtetcher SNF 2011-12-10 15:58:33: Turbo went off Message-ID: Cooling water is restored. From eenriquez at snf.stanford.edu Mon Dec 12 09:27:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:27:03 -0800 Subject: Shutdown amtetcher SNF 2011-12-11 11:57:49: Hot loop pump Message-ID: Replaced the hot loop pump and ran standby recipe. From sclaussen at snf.stanford.edu Mon Dec 12 12:03:26 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 12 Dec 2011 12:03:26 -0800 Subject: Problem amtetcher SNF 2011-12-12 12:03:25: Vacuum wand is not working Message-ID: From mdickey at snf.stanford.edu Mon Dec 12 13:32:41 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 12 Dec 2011 13:32:41 -0800 Subject: Problem amtetcher SNF 2011-12-12 12:03:25: Vacuum wand is not working Message-ID: wand replaced From eenriquez at snf.stanford.edu Tue Dec 13 14:39:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Dec 2011 14:39:41 -0800 Subject: Shutdown amtetcher SNF 2011-12-13 14:39:41: Scheduled shutdown Message-ID: