Comment amtetcher SNF 2010-11-10 16:16:05: Prog#4 with increased CM pressure
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Dec 7 14:53:44 PST 2011
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Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min
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Comment amtetcher SNF 2011-01-18 17:17:42: #4 Si etch rate ~210A/min
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Comment amtetcher SNF 2010-11-09 21:51:11: #4 poly si etch rate=133A/min
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