From eenriquez at snf.stanford.edu Tue Feb 1 08:27:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Feb 2011 08:27:47 -0800 Subject: Shutdown amtetcher SNF 2011-01-31 17:12:34: Bell jar won't go up Message-ID: Adjusted bell jar brake. Cycled bell jar many times without any problems. From latta at snf.stanford.edu Tue Feb 1 15:06:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Feb 2011 15:06:11 -0800 Subject: Problem amtetcher SNF 2011-02-01 15:06:11: Pressure during etch not stable Message-ID: The chamber pressure jumped up and down between 50 and 42mT during prog #3 etch. It is usual quite stable at 40mT. From cbaxter at snf.stanford.edu Tue Feb 1 15:53:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Feb 2011 15:53:07 -0800 Subject: Problem amtetcher SNF 2011-02-01 15:06:11: Pressure during etch not stable Message-ID: Tighten throttle valve and ran recipe#1 and 3 pressure is now stable at +/-2 mt at 40mt setpoint.. From haemmerl at snf.stanford.edu Fri Feb 4 11:42:30 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Fri, 4 Feb 2011 11:42:30 -0800 Subject: Comment amtetcher SNF 2011-02-04 11:42:30: SI #4 to low Message-ID: Measured single crystal silicon etch rate with process #4: ~60 A/min... Seems way too low From cachang at snf.stanford.edu Sun Feb 6 10:20:06 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 6 Feb 2011 10:20:06 -0800 Subject: Comment amtetcher SNF 2011-02-06 10:20:05: #4 Si etch rate Message-ID: run 5.5 mins for ASML alignment mark. Etch rate ~ 187 A/min From eenriquez at snf.stanford.edu Mon Feb 7 11:06:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Feb 2011 11:06:45 -0800 Subject: Comment amtetcher SNF 2010-11-22 13:36:31: Update low etch rate Message-ID: Archived From eenriquez at snf.stanford.edu Mon Feb 7 11:08:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Feb 2011 11:08:21 -0800 Subject: Comment amtetcher SNF 2011-02-07 11:08:21: Completed monthly PM. Message-ID: From haemmerl at snf.stanford.edu Tue Feb 8 06:11:00 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Tue, 8 Feb 2011 06:11:00 -0800 Subject: Shutdown amtetcher SNF 2011-02-08 06:10:59: Arcing occured with process #3 Message-ID: I Shut it down because of arcing on the side of the first tray. From mdickey at snf.stanford.edu Tue Feb 8 07:58:24 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Feb 2011 07:58:24 -0800 Subject: Shutdown amtetcher SNF 2011-02-08 06:10:59: Arcing occured with process #3 Message-ID: Saw some arcing on tray 3. Adjusted tray. This does not appear to be arcing but rather flilckering of the plasma. Ran recipe 2 with no problems From haemmerl at snf.stanford.edu Tue Feb 8 12:08:29 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Tue, 8 Feb 2011 12:08:29 -0800 Subject: Shutdown amtetcher SNF 2011-02-08 12:08:28: Powered itself down Message-ID: When opening the bell, it suddenly switched down by itself. Asked around to see if there is any eay fast fix, nothing helped. From latta at snf.stanford.edu Tue Feb 8 15:17:23 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 Feb 2011 15:17:23 -0800 Subject: Shutdown amtetcher SNF 2011-02-08 12:08:28: Powered itself down Message-ID: back in operation. All programs re-entered. Possible breaker switch problem. Looking into replacement. From latta at snf.stanford.edu Tue Feb 8 15:18:52 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 Feb 2011 15:18:52 -0800 Subject: Comment amtetcher SNF 2011-02-08 15:18:50: No Chilled Flow msg Message-ID: Elmer checked the chiller in the basement- shows flow. I was able to run prog 4 for 5 mins even after getting the msg. It happened again at the end of the run. From cursive at snf.stanford.edu Tue Feb 8 23:58:38 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:58:38 -0800 Subject: Problem amtetcher SNF 2011-02-08 23:58:38: error message Message-ID: no chilled flow. From eenriquez at snf.stanford.edu Wed Feb 9 09:40:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Feb 2011 09:40:49 -0800 Subject: Problem amtetcher SNF 2011-02-08 23:58:38: error message Message-ID: Repaired corroded water flow switch wire From eenriquez at snf.stanford.edu Wed Feb 9 09:41:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Feb 2011 09:41:03 -0800 Subject: Comment amtetcher SNF 2011-02-08 15:18:50: No Chilled Flow msg Message-ID: Repaired corroded water flow switch wire From alsune at snf.stanford.edu Wed Feb 9 20:28:14 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 9 Feb 2011 20:28:14 -0800 Subject: Shutdown amtetcher SNF 2011-02-09 20:28:14: sparking in the chamber Message-ID: I've preinspected the hex rode thorougly before running my process (program #1) which seemed fine. However, upon running the process, I've noticed sparks going on within the holding plate. I've immediately aborted the etch and change to standby program but realized that it would still have the spark happening. Please do not use the system until proper maintenance is performed. Right now the system is vented. From alsune at snf.stanford.edu Wed Feb 9 20:34:52 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 9 Feb 2011 20:34:52 -0800 Subject: Comment amtetcher SNF 2011-02-09 20:34:52: correction on the last known state of the system Message-ID: I've recorded on the shutdown comment that the system is vented. I pressed the vent button and assumed that it would be vented, but it returned an error message saying "Vent time-out" From mdickey at snf.stanford.edu Thu Feb 10 08:09:50 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 10 Feb 2011 08:09:50 -0800 Subject: Shutdown amtetcher SNF 2011-02-09 20:28:14: sparking in the chamber Message-ID: No evidence of arcing....under observation From eenriquez at snf.stanford.edu Thu Feb 10 09:22:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Feb 2011 09:22:14 -0800 Subject: Comment amtetcher SNF 2011-02-09 20:34:52: correction on the last known state of the system Message-ID: Vent times out when the tool is disabled on Coral. From latta at snf.stanford.edu Thu Feb 10 10:04:22 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 10 Feb 2011 10:04:22 -0800 Subject: Comment amtetcher SNF 2011-02-10 10:04:21: Etch rate check- Prog #4, 5 mins Message-ID: Prog #4 for 5 mins, CHF3 gas cal at 0.58 Tray #1 1014A, ER = 203A/min #2 998, 200A/min #3 1056, 211A/min #4 1061, 212A/min #5 1146, 229A/min #6 1084, 217A/min From alsune at snf.stanford.edu Thu Feb 10 15:08:55 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 10 Feb 2011 15:08:55 -0800 Subject: Comment amtetcher SNF 2011-02-10 15:08:54: Arcing in Prgm #1 Message-ID: I still see arching problem in program #1. Nancy has confirmed this problem with me and is waiting for maintenance. From cachang at snf.stanford.edu Thu Feb 10 18:42:05 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Thu, 10 Feb 2011 18:42:05 -0800 Subject: Comment amtetcher SNF 2011-02-10 18:42:05: #3 PR etch rate Message-ID: three etching (same wafer, 0.7um PR): 1. 82.56 A/min (5 mins) 2. 57.28 A/min (21.5min) 3. 70.4 A/min (5 mins) etch rate not stable From jcdoll at snf.stanford.edu Thu Feb 10 20:08:59 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Thu, 10 Feb 2011 20:08:59 -0800 Subject: Comment amtetcher SNF 2011-02-10 20:08:59: #4 Si etch rate check Message-ID: 10 min season 5.5 min ASML alignment mark etch using program #4 ~110nm measured on P2, ~200A/min no arcing observed From eenriquez at snf.stanford.edu Fri Feb 11 14:57:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Feb 2011 14:57:21 -0800 Subject: Comment amtetcher SNF 2011-02-10 15:08:54: Arcing in Prgm #1 Message-ID: What you have observed is not arcing but a change in plasma density. These areas of denser plasma sometimes form where there are gaps in the insulation such as the edges and corners of trays, Recipe1 seems to be more susceptible to this because of the chemistry. They should not however, affect your process unless they are extremely intense and remains in one spot. If this is the case, ven the chamber and verify that the tray clamps are properly engaged. If the clamps are OK, exchange the problematic tray with another tray and then re-run the process. From aintlekofer at snf.stanford.edu Mon Feb 14 10:54:19 2011 From: aintlekofer at snf.stanford.edu (aintlekofer at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:54:19 -0800 Subject: Comment amtetcher SNF 2011-02-14 10:54:19: Message-ID: From aintlekofer at snf.stanford.edu Mon Feb 14 10:55:02 2011 From: aintlekofer at snf.stanford.edu (aintlekofer at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:55:02 -0800 Subject: Comment amtetcher SNF 2011-02-14 10:55:01: vacuum wand tip broken! Message-ID: From aintlekofer at snf.stanford.edu Mon Feb 14 10:58:34 2011 From: aintlekofer at snf.stanford.edu (aintlekofer at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:58:34 -0800 Subject: Problem amtetcher SNF 2011-02-14 10:58:33: vacuum wand tip broken! Message-ID: From maurice at snf.stanford.edu Mon Feb 14 11:12:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Feb 2011 11:12:39 -0800 Subject: Problem amtetcher SNF 2011-02-14 10:58:33: vacuum wand tip broken! Message-ID: replaced From maurice at snf.stanford.edu Mon Feb 14 11:13:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Feb 2011 11:13:02 -0800 Subject: Comment amtetcher SNF 2011-02-14 10:55:01: vacuum wand tip broken! Message-ID: replaced From maurice at snf.stanford.edu Mon Feb 14 11:13:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Feb 2011 11:13:25 -0800 Subject: Comment amtetcher SNF 2011-02-14 10:54:19: Message-ID: archived From junam at snf.stanford.edu Fri Feb 18 22:20:57 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 18 Feb 2011 22:20:57 -0800 Subject: Problem amtetcher SNF 2011-02-18 22:20:56: dummy wafer broken Message-ID: broke a dummy wafer by the chamber (tray 4). wiped out the chamber and replaced the dummy From cbaxter at snf.stanford.edu Sat Feb 19 18:28:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 19 Feb 2011 18:28:07 -0800 Subject: Problem amtetcher SNF 2011-02-18 22:20:56: dummy wafer broken Message-ID: From haemmerl at snf.stanford.edu Mon Feb 28 17:03:01 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Mon, 28 Feb 2011 17:03:01 -0800 Subject: Problem amtetcher SNF 2011-02-28 17:03:00: alarm: Turbo purge high Message-ID: After 3min during process 3. Ran 2min again without problem...