From eenriquez at snf.stanford.edu Mon Jan 3 08:17:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2011 08:17:22 -0800 Subject: Shutdown amtetcher SNF 2011-01-03 08:17:22: Chamber leak Message-ID: From cbaxter at snf.stanford.edu Thu Jan 6 17:18:46 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 6 Jan 2011 17:18:46 -0800 Subject: Comment amtetcher SNF 2011-01-06 17:18:46: Update Message-ID: Removed heater jacket and put sealing compound on flange weldment, still picking up 4 scale leak. Will continue to troubleshoot. From eenriquez at snf.stanford.edu Fri Jan 7 15:08:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:08:39 -0800 Subject: Comment amtetcher SNF 2011-01-07 15:08:38: Update Message-ID: Isolated the leak to the hexode. We will examine the hexode assembly and the rotary feedthrough again.. If we can repair the leak by Monday, the system should be ready by Friday, 1/14. From eenriquez at snf.stanford.edu Mon Jan 10 15:29:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:29:30 -0800 Subject: Comment amtetcher SNF 2011-01-10 15:29:29: Update Message-ID: Removed the hexode. Still trying to isolate the leaks. From eenriquez at snf.stanford.edu Wed Jan 12 18:42:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Jan 2011 18:42:50 -0800 Subject: Comment amtetcher SNF 2011-01-10 15:29:29: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 12 18:42:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Jan 2011 18:42:58 -0800 Subject: Comment amtetcher SNF 2011-01-07 15:08:38: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 12 18:43:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Jan 2011 18:43:06 -0800 Subject: Comment amtetcher SNF 2011-01-06 17:18:46: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 12 19:01:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Jan 2011 19:01:19 -0800 Subject: Comment amtetcher SNF 2011-01-12 19:01:19: Update Message-ID: Replaced leaky roughing line bellows. Reassembled the system. Now the chamber is under vacuum. Will continue leak checking tomorrow. If no more leaks are found, we will run quals. From eenriquez at snf.stanford.edu Thu Jan 13 12:16:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 12:16:25 -0800 Subject: Comment amtetcher SNF 2011-01-13 12:16:25: Update Message-ID: Great News. The system is leak tight (0 mT/min rate of rise). Ran the standby recipe (#2). Need to perform a few more checks. If everything is OK, the system should be ready for qual by 2 pm. From eenriquez at snf.stanford.edu Thu Jan 13 14:07:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:07:14 -0800 Subject: Shutdown amtetcher SNF 2011-01-03 08:17:22: Chamber leak Message-ID: Chamber leak has been repaired. We replaced the roughing line bellows. Reentered all system constants, MFC calibration factors and recipes 1-4. Nancy is now running the qual. From eenriquez at snf.stanford.edu Thu Jan 13 14:07:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:07:24 -0800 Subject: Comment amtetcher SNF 2011-01-12 19:01:19: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jan 13 14:07:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:07:33 -0800 Subject: Comment amtetcher SNF 2011-01-13 12:16:25: Update Message-ID: Archived From latta at snf.stanford.edu Thu Jan 13 15:44:27 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:44:27 -0800 Subject: Problem amtetcher SNF 2010-10-28 14:18:40: Quick Etch Rate check for Prog #4 Message-ID: new quals coming soon From latta at snf.stanford.edu Thu Jan 13 15:45:22 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:45:22 -0800 Subject: Problem amtetcher SNF 2010-10-18 11:44:41: Please monitor your etch rates! Message-ID: new quals coming From latta at snf.stanford.edu Thu Jan 13 15:48:12 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:48:12 -0800 Subject: Comment amtetcher SNF 2011-01-13 15:48:12: Quick oxide check completed after leak repair Message-ID: A quick thermal ox etch was done. ER = 362A/min. Full multi-thin film qual will be done soon, but for now check etch rates for your work and cautiously use the etcher. From latta at snf.stanford.edu Thu Jan 13 15:48:33 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:48:33 -0800 Subject: Problem amtetcher SNF 2010-10-19 19:08:31: asml marks come out shallow Message-ID: qual coming From latta at snf.stanford.edu Thu Jan 13 15:49:10 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:49:10 -0800 Subject: Comment amtetcher SNF 2010-12-09 15:12:15: Quick ox ER run- ok Message-ID: new quick check done From latta at snf.stanford.edu Thu Jan 13 15:49:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:49:35 -0800 Subject: Comment amtetcher SNF 2010-12-10 15:23:12: Another quick ER test Message-ID: new quick check done From latta at snf.stanford.edu Thu Jan 13 15:49:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:49:57 -0800 Subject: Comment amtetcher SNF 2010-10-28 12:08:38: Update hot loop temperature Message-ID: archived From latta at snf.stanford.edu Thu Jan 13 15:50:24 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:50:24 -0800 Subject: Comment amtetcher SNF 2010-10-27 14:55:21: dummies replaced with new wafers Message-ID: archived From eenriquez at snf.stanford.edu Fri Jan 14 08:08:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Jan 2011 08:08:58 -0800 Subject: Comment amtetcher SNF 2010-10-19 10:16:57: Update low etch rate Message-ID: Archived From fpurkl at snf.stanford.edu Tue Jan 18 15:27:51 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Tue, 18 Jan 2011 15:27:51 -0800 Subject: Problem amtetcher SNF 2011-01-18 15:27:51: missing clip Message-ID: 3rd tray 3rd spot from top is missing one holding clip From cbaxter at snf.stanford.edu Tue Jan 18 17:08:44 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 18 Jan 2011 17:08:44 -0800 Subject: Problem amtetcher SNF 2011-01-18 15:27:51: missing clip Message-ID: Changed broken clip on tray#3.. From cursive at snf.stanford.edu Tue Jan 18 17:17:42 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 18 Jan 2011 17:17:42 -0800 Subject: Comment amtetcher SNF 2011-01-18 17:17:42: #4 Si etch rate ~210A/min Message-ID: si etch rate test ~210A/min From paik at snf.stanford.edu Tue Jan 18 18:08:14 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Tue, 18 Jan 2011 18:08:14 -0800 Subject: Problem amtetcher SNF 2011-01-18 18:08:13: AMT failure Message-ID: After 15 min prime run while the bell jar was being hoised up power went out of the tool. From paik at snf.stanford.edu Tue Jan 18 18:08:57 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Tue, 18 Jan 2011 18:08:57 -0800 Subject: Shutdown amtetcher SNF 2011-01-18 18:08:57: AMT power failure Message-ID: after 15 min prime run of program 4 while bell jar was being hoised up power went out. From eenriquez at snf.stanford.edu Wed Jan 19 12:16:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:16:54 -0800 Subject: Shutdown amtetcher SNF 2011-01-18 18:08:57: AMT power failure Message-ID: Adjusted the bell jar lift brakes. Reentered all system parameters and reprogrammed recipes 2 and 3. Need to enter progaramming for all other recipes. Chamber leak rate is 2 mT/min. Cycled the bell jar up and down several times with no problems. Ran standby recipes From eenriquez at snf.stanford.edu Wed Jan 19 12:17:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:17:03 -0800 Subject: Problem amtetcher SNF 2011-01-18 18:08:13: AMT failure Message-ID: Adjusted the bell jar lift brakes. Reentered all system parameters and reprogrammed recipes 2 and 3. Need to enter progaramming for all other recipes. Chamber leak rate is 2 mT/min. Cycled the bell jar up and down several times with no problems. Ran standby recipes From paik at snf.stanford.edu Wed Jan 19 13:41:52 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Wed, 19 Jan 2011 13:41:52 -0800 Subject: Problem amtetcher SNF 2011-01-19 13:41:52: wand Message-ID: vac wand head is loose. From eenriquez at snf.stanford.edu Wed Jan 19 15:23:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 15:23:01 -0800 Subject: Problem amtetcher SNF 2011-01-19 13:41:52: wand Message-ID: Repaired loose wand From karthikv at snf.stanford.edu Thu Jan 20 13:08:57 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 20 Jan 2011 13:08:57 -0800 Subject: Comment amtetcher SNF 2011-01-20 13:08:57: #3 Ox etch rate Message-ID: Seems to be a bit low. Tray #2 ~ 272 A/min Gas flows, pressure and power normal. Hex temperature was at 28C at the end of the etch From mtang at snf.stanford.edu Thu Jan 20 16:04:19 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 20 Jan 2011 16:04:19 -0800 Subject: Comment amtetcher SNF 2011-01-20 16:04:18: Message-ID: From mtang at snf.stanford.edu Thu Jan 20 21:59:36 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 20 Jan 2011 21:59:36 -0800 Subject: Comment amtetcher SNF 2011-01-20 21:59:35: Quals part 1 Message-ID: Ran part of the quals for recipe #3, as per wiki procedures. Thermal oxide etch rate = 353 A/min Within wafer nonuniformity = 4.1% Across the load total nonuniformity = 4.4% Resist etch rate = 67 A/min More to come. From insun at snf.stanford.edu Sat Jan 22 19:07:04 2011 From: insun at snf.stanford.edu (insun at snf.stanford.edu) Date: Sat, 22 Jan 2011 19:07:04 -0800 Subject: Comment amtetcher SNF 2011-01-22 19:07:03: no prog#1 Message-ID: Prog #1 is deleted, and there is no back up at Prog#11 either. From mtang at snf.stanford.edu Mon Jan 24 14:07:51 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 14:07:51 -0800 Subject: Comment amtetcher SNF 2011-01-24 14:07:50: Broken pin & darker area Message-ID: Report from a concerned user: Broken pin on the top wafer position of tray #1 and a darker, charred area in the middle of the fourth tray. From mdickey at snf.stanford.edu Tue Jan 25 06:51:27 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 25 Jan 2011 06:51:27 -0800 Subject: Comment amtetcher SNF 2011-01-24 14:07:50: Broken pin & darker area Message-ID: Replaced broken clip on tray 1. Cleaned up arc marks on behind tray 4. Tighted loose tray 5. From dasgupta at snf.stanford.edu Tue Jan 25 16:06:38 2011 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Tue, 25 Jan 2011 16:06:38 -0800 Subject: Shutdown amtetcher SNF 2011-01-25 16:06:37: Power loss Message-ID: When raising bell jar, power completely shut off. I did not hit emergency off, so I do not know the reason for this. Sorry for the inconvenience. From cbaxter at snf.stanford.edu Tue Jan 25 17:36:02 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 Jan 2011 17:36:02 -0800 Subject: Shutdown amtetcher SNF 2011-01-25 16:06:37: Power loss Message-ID: Reset system and entered all the recipes. Please check your recipe before using the tool. From dasgupta at snf.stanford.edu Wed Jan 26 14:06:13 2011 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Wed, 26 Jan 2011 14:06:13 -0800 Subject: Problem amtetcher SNF 2011-01-26 14:06:13: system requires multiple vent cycles Message-ID: The system requires pressing the vent button multiple times to fully vent the chamber. After pressing vent once, the vent cycle timed out. A repeat vent solved the problem. The previous user noticed this as well. Maybe the flow rate of venting gas has been reduced? From eenriquez at snf.stanford.edu Wed Jan 26 16:22:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Jan 2011 16:22:22 -0800 Subject: Problem amtetcher SNF 2011-01-26 14:06:13: system requires multiple vent cycles Message-ID: Adjusted vent time. From ericp at snf.stanford.edu Fri Jan 28 02:38:27 2011 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 28 Jan 2011 02:38:27 -0800 Subject: Problem amtetcher SNF 2011-01-28 02:38:27: broken clip Message-ID: clip is broken on tray #1, bottom position. From eenriquez at snf.stanford.edu Fri Jan 28 07:56:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Jan 2011 07:56:17 -0800 Subject: Comment amtetcher SNF 2011-01-20 16:04:18: Message-ID: From eenriquez at snf.stanford.edu Fri Jan 28 08:13:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Jan 2011 08:13:37 -0800 Subject: Problem amtetcher SNF 2011-01-28 02:38:27: broken clip Message-ID: Mike replaced the clip. From latta at snf.stanford.edu Fri Jan 28 15:57:29 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 28 Jan 2011 15:57:29 -0800 Subject: Comment amtetcher SNF 2011-01-22 19:07:03: no prog#1 Message-ID: prog #1 is there now From latta at snf.stanford.edu Fri Jan 28 17:00:58 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 28 Jan 2011 17:00:58 -0800 Subject: Comment amtetcher SNF 2011-01-28 17:00:57: Jan 2011 quals (ERs and Selectivities) Message-ID: Can br found on wiki at; https://snf.stanford.edu/SNF/equipment/dry-etching/amt-8100-plasma-etcher-amtetcher-semi-clean/new-recent-qualification-results From latta at snf.stanford.edu Fri Jan 28 17:01:28 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 28 Jan 2011 17:01:28 -0800 Subject: Comment amtetcher SNF 2011-01-20 13:08:57: #3 Ox etch rate Message-ID: archived From latta at snf.stanford.edu Fri Jan 28 17:01:40 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 28 Jan 2011 17:01:40 -0800 Subject: Comment amtetcher SNF 2011-01-13 15:48:12: Quick oxide check completed after leak repair Message-ID: full quals posted From karthikv at snf.stanford.edu Mon Jan 31 17:12:34 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Mon, 31 Jan 2011 17:12:34 -0800 Subject: Shutdown amtetcher SNF 2011-01-31 17:12:34: Bell jar won't go up Message-ID: The bell jar stopped working midway as I was trying to open the chamber to load my wafers. At first it didn't go up but it was able to go down and then it stopped responding completely.