Comment amtetcher SNF 2011-01-13 15:48:12: Quick oxide check completed after leak repair

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jan 13 15:48:12 PST 2011


A quick thermal ox etch was done.  ER = 362A/min.
Full multi-thin film qual will be done soon, but for now check etch rates for your work and cautiously use the etcher.




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